Membership
Tour
Register
Log in
Sungseo Cho
Follow
Person
Sturbridge, MA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Metrology of bilayer photoresist processes
Patent number
7,901,852
Issue date
Mar 8, 2011
FREESCALE SEMICONDUCTOR, INC.
Cesar M. Garza
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Metrology of bilayer photoresist processes
Publication number
20090220895
Publication date
Sep 3, 2009
Freescale Semiconductor, Inc.
Cesar M. Garza
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY