Sungseo Cho

Person

  • Sturbridge, MA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Metrology of bilayer photoresist processes

    • Publication number 20090220895
    • Publication date Sep 3, 2009
    • Freescale Semiconductor, Inc.
    • Cesar M. Garza
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY