Sungtae Lee

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and storage medium
- Patent number 8,986,561
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Sungtae Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method, control program and computer storage medium
- Patent number 8,642,482
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method, plasma etching apparatus, and computer-reada...
- Patent number 8,609,549
- Issue date Dec 17, 2013
- Tokyo Electron Limited
- Sungtae Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposit removing method and substrate processing method
- Patent number 8,303,719
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Sungtae Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method, control program and computer storage medium
- Patent number 8,298,960
- Issue date Oct 30, 2012
- Tokyo Electron Limited
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD, CONTROL PROGRAM AND COMPUTER STORAGE MEDIUM
- Publication number 20130029493
- Publication date Jan 31, 2013
- Masahiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, AND COMPUTER-READA...
- Publication number 20110250761
- Publication date Oct 13, 2011
- TOKYO ELECTRON LIMITED
- Sungtae LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20100163525
- Publication date Jul 1, 2010
- TOKYO ELECTRON LIMITED
- Sungtae LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, CONTROL PROGRAM AND COMPUTER STORAGE MEDIUM
- Publication number 20100003825
- Publication date Jan 7, 2010
- TOKYO ELECTRON LIMITED
- Masahiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSIT REMOVING METHOD AND SUBSTRATE PROCESSING METHOD
- Publication number 20090205678
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Sungtae LEE
- H01 - BASIC ELECTRIC ELEMENTS