Sungwon HA

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 12,000,048
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber with reduced plasma arc
- Patent number 11,875,969
- Issue date Jan 16, 2024
- Applied Materials, Inc.
- Fei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment for high-temperature cleans
- Patent number 11,699,577
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber configurations and processes for particle control
- Patent number 11,670,492
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Fei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Targeted heat control systems
- Patent number 11,600,470
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 11,584,994
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radiation shield modification for improving substrate temperature u...
- Patent number 11,515,129
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Elizabeth Neville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing using multiple radio frequency power feeds for im...
- Patent number 11,276,562
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing using multiple radio frequency power feeds for im...
- Patent number 10,580,623
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of processing wafers with compressive or tensi...
- Patent number 10,403,535
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge hump reduction faceplate by plasma modulation
- Patent number 10,100,408
- Issue date Oct 16, 2018
- Applied Materials, Inc.
- Sungwon Ha
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
- Publication number 20240352580
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Zaoyuan Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL
- Publication number 20230298870
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Fei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230203659
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
- Publication number 20230120710
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Zaoyuan Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT FOR HIGH-TEMPERATURE CLEANS
- Publication number 20220384161
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Sarah Michelle Bobek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER DEPOSITION CONFINEMENT
- Publication number 20220130650
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL
- Publication number 20220122823
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Fei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR FACEPLATE TEMPERATURE CONTROL
- Publication number 20220020612
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TARGETED HEAT CONTROL SYSTEMS
- Publication number 20210202218
- Publication date Jul 1, 2021
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD MODIFICATION FOR IMPROVING SUBSTRATE TEMPERATURE U...
- Publication number 20210166921
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Elizabeth Neville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK
- Publication number 20210043455
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER WITH REDUCED PLASMA ARC
- Publication number 20200365370
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Fei WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20200224310
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...
- Publication number 20200203132
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM WAFER TEMPERATURE ACHIEVEMENT IN UNSYMMETRIC CHAMBER ENVIRO...
- Publication number 20170178758
- Publication date Jun 22, 2017
- Applied Materials, Inc.
- Sungwon HA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSI...
- Publication number 20160049323
- Publication date Feb 18, 2016
- Applied Materials, Inc.
- Zheng John YE
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
EDGE HUMP REDUCTION FACEPLATE BY PLASMA MODULATION
- Publication number 20150247237
- Publication date Sep 3, 2015
- Applied Materials, Inc.
- Sungwon HA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...
- Publication number 20150136325
- Publication date May 21, 2015
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Pedestal for substrate processing chambers

Process chamber with reduced plasma arc

Treatment for high-temperature cleans

Chamber configurations and processes for particle control

Targeted heat control systems

Pedestal for substrate processing chambers

Radiation shield modification for improving substrate temperature u...

Plasma processing using multiple radio frequency power feeds for im...

Plasma processing using multiple radio frequency power feeds for im...

Method and apparatus of processing wafers with compressive or tensi...

Edge hump reduction faceplate by plasma modulation

Patents Applicationslast 30 patents

SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE

CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL

PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS

DOWNSTREAM RESIDUE MANAGEMENT HARDWARE

TREATMENT FOR HIGH-TEMPERATURE CLEANS

PROCESSING CHAMBER DEPOSITION CONFINEMENT

CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL

SYSTEMS AND METHODS FOR FACEPLATE TEMPERATURE CONTROL

TARGETED HEAT CONTROL SYSTEMS

RADIATION SHIELD MODIFICATION FOR IMPROVING SUBSTRATE TEMPERATURE U...

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK

PROCESS CHAMBER WITH REDUCED PLASMA ARC

PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS

PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...

UNIFORM WAFER TEMPERATURE ACHIEVEMENT IN UNSYMMETRIC CHAMBER ENVIRO...

METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSI...

EDGE HUMP REDUCTION FACEPLATE BY PLASMA MODULATION

PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...