Sunil Kapoor

Person

Vancouver, WA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Radio frequency power generator having multiple output ports
- Patent number 12,205,796
- Issue date Jan 21, 2025
- Lam Research Corporation
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Early warning systems and methods for determining capacitor failures
- Patent number 12,176,189
- Issue date Dec 24, 2024
- Lam Research Corporation
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 12,143,087
- Issue date Nov 12, 2024
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF current measurement in semiconductor processing tool
- Patent number 12,051,630
- Issue date Jul 30, 2024
- Lam Research Corporation
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mutually induced filters
- Patent number 12,052,006
- Issue date Jul 30, 2024
- Lam Research Corporation
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple-output radiofrequency matching module and associated methods
- Patent number 12,040,770
- Issue date Jul 16, 2024
- Lam Research Corporation
- Karl Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF signal parameter measurement in an integrated circuit fabricatio...
- Patent number 11,994,542
- Issue date May 28, 2024
- Lam Research Corporation
- Sunil Kapoor
- G01 - MEASURING TESTING
Information Patent Grant
Capacitance measurement without disconnecting from high power circuit
- Patent number 11,881,381
- Issue date Jan 23, 2024
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of wafer bow in multiple stations
- Patent number 11,823,928
- Issue date Nov 21, 2023
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 11,784,027
- Issue date Oct 10, 2023
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular recipe controlled calibration (MRCC) apparatus used to bala...
- Patent number 11,594,397
- Issue date Feb 28, 2023
- Lam Research Corporation
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 11,264,207
- Issue date Mar 1, 2022
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mutually induced filters
- Patent number 11,258,420
- Issue date Feb 22, 2022
- Lam Research Corporation
- Sunil Kapoor
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 11,258,421
- Issue date Feb 22, 2022
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of wafer bow in multiple stations
- Patent number 11,183,406
- Issue date Nov 23, 2021
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple-output radiofrequency matching module and associated methods
- Patent number 11,038,483
- Issue date Jun 15, 2021
- Lam Research Corporation
- Karl Leeser
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Modular recipe controlled calibration (MRCC) apparatus used to bala...
- Patent number 10,991,550
- Issue date Apr 27, 2021
- Lam Research Corporation
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fault detection using showerhead voltage variation
- Patent number 10,879,092
- Issue date Dec 29, 2020
- Lam Research Corporation
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF generator for generating a modulated frequency or an inter-modul...
- Patent number 10,665,427
- Issue date May 26, 2020
- Lam Research Corporation
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple-output radiofrequency matching module and associated methods
- Patent number 10,666,218
- Issue date May 26, 2020
- Lam Research Corporation
- Karl Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 10,636,624
- Issue date Apr 28, 2020
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mutually induced filters
- Patent number 10,637,427
- Issue date Apr 28, 2020
- Lam Research Corporation
- Sunil Kapoor
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 10,622,962
- Issue date Apr 14, 2020
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of water bow in multiple stations
- Patent number 10,553,465
- Issue date Feb 4, 2020
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 10,373,805
- Issue date Aug 6, 2019
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF generator for generating a modulated frequency or an inter-modul...
- Patent number 10,304,663
- Issue date May 28, 2019
- Lam Research Corporation
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 10,187,032
- Issue date Jan 22, 2019
- Lam Research Corporation
- Sunil Kapoor
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Multi-station plasma reactor with RF balancing
- Patent number 10,145,010
- Issue date Dec 4, 2018
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 10,043,636
- Issue date Aug 7, 2018
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fault detection using showerhead voltage variation
- Patent number 10,043,690
- Issue date Aug 7, 2018
- Lam Research Corporation
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS
- Publication number 20250118533
- Publication date Apr 10, 2025
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EARLY WARNING SYSTEMS AND METHODS FOR DETERMINING CAPACITOR FAILURES
- Publication number 20250079140
- Publication date Mar 6, 2025
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...
- Publication number 20250070741
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...
- Publication number 20240355600
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MUTUALLY INDUCED FILTERS
- Publication number 20240348223
- Publication date Oct 17, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF CURRENT MEASUREMENT IN SEMICONDUCTOR PROCESSING TOOL
- Publication number 20240347400
- Publication date Oct 17, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multiple-Output Radiofrequency Matching Module and Associated Methods
- Publication number 20240322781
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Karl Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...
- Publication number 20240272210
- Publication date Aug 15, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- G01 - MEASURING TESTING
Information Patent Application
RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...
- Publication number 20240203711
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT
- Publication number 20240096598
- Publication date Mar 21, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20240055285
- Publication date Feb 15, 2024
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...
- Publication number 20230420218
- Publication date Dec 28, 2023
- LAM RESEARCH CORPORATION
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selected Reject Band Non-Radiofrequency-Coupling Tile and Associate...
- Publication number 20230262898
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALA...
- Publication number 20230245853
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...
- Publication number 20230246624
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Yaswanth Rangineni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS...
- Publication number 20230071933
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR USING A TRANSFORMER TO ACHIEVE UNIFORMITY I...
- Publication number 20230009651
- Publication date Jan 12, 2023
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS
- Publication number 20220415625
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS
- Publication number 20220344129
- Publication date Oct 27, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY DISTRIBUTION CIRCUITS INCLUDING TRANSFORMERS AND/OR...
- Publication number 20220328236
- Publication date Oct 13, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EARLY WARNING SYSTEMS AND METHODS FOR DETERMINING CAPACITOR FAILURES
- Publication number 20220172933
- Publication date Jun 2, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...
- Publication number 20220158604
- Publication date May 19, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MUTUALLY INDUCED FILTERS
- Publication number 20220149801
- Publication date May 12, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...
- Publication number 20220139670
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20220051919
- Publication date Feb 17, 2022
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...
- Publication number 20220037135
- Publication date Feb 3, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multiple-Output Radiofrequency Matching Module and Associated Methods
- Publication number 20210313948
- Publication date Oct 7, 2021
- LAM RESEARCH CORPORATION
- Karl Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...
- Publication number 20210302478
- Publication date Sep 30, 2021
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALA...
- Publication number 20210202208
- Publication date Jul 1, 2021
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT
- Publication number 20210098233
- Publication date Apr 1, 2021
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sunil Kapoor

Person

Patents Grantslast 30 patents

Radio frequency power generator having multiple output ports

Early warning systems and methods for determining capacitor failures

Combiner and distributor for adjusting impedances or power across m...

RF current measurement in semiconductor processing tool

Mutually induced filters

Multiple-output radiofrequency matching module and associated methods

RF signal parameter measurement in an integrated circuit fabricatio...

Capacitance measurement without disconnecting from high power circuit

Control of wafer bow in multiple stations

Apparatuses and methods for avoiding electrical breakdown from RF t...

Modular recipe controlled calibration (MRCC) apparatus used to bala...

Apparatuses and methods for avoiding electrical breakdown from RF t...

Mutually induced filters

Combiner and distributor for adjusting impedances or power across m...

Control of wafer bow in multiple stations

Multiple-output radiofrequency matching module and associated methods

Modular recipe controlled calibration (MRCC) apparatus used to bala...

Fault detection using showerhead voltage variation

RF generator for generating a modulated frequency or an inter-modul...

Multiple-output radiofrequency matching module and associated methods

Apparatuses and methods for avoiding electrical breakdown from RF t...

Mutually induced filters

Combiner and distributor for adjusting impedances or power across m...

Control of water bow in multiple stations

Apparatuses and methods for avoiding electrical breakdown from RF t...

RF generator for generating a modulated frequency or an inter-modul...

Combiner and distributor for adjusting impedances or power across m...

Multi-station plasma reactor with RF balancing

Apparatuses and methods for avoiding electrical breakdown from RF t...

Fault detection using showerhead voltage variation

Patents Applicationslast 30 patents

RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS

EARLY WARNING SYSTEMS AND METHODS FOR DETERMINING CAPACITOR FAILURES

COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...

ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...

MUTUALLY INDUCED FILTERS

RF CURRENT MEASUREMENT IN SEMICONDUCTOR PROCESSING TOOL

Multiple-Output Radiofrequency Matching Module and Associated Methods

RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...

RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...

CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...

Selected Reject Band Non-Radiofrequency-Coupling Tile and Associate...

MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALA...

SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...

PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS...

SYSTEMS AND METHODS FOR USING A TRANSFORMER TO ACHIEVE UNIFORMITY I...

SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS

RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS

RADIO FREQUENCY DISTRIBUTION CIRCUITS INCLUDING TRANSFORMERS AND/OR...

EARLY WARNING SYSTEMS AND METHODS FOR DETERMINING CAPACITOR FAILURES

COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...

MUTUALLY INDUCED FILTERS

APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...

Multiple-Output Radiofrequency Matching Module and Associated Methods

RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...

MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALA...

CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT