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Hsinchu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Etch damage and ESL free dual damascene metal interconnect
Patent number
11,955,376
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch damage and ESL free dual damascene metal interconnect
Patent number
11,171,041
Issue date
Nov 9, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch damage and ESL free dual damascene metal interconnect
Patent number
10,312,136
Issue date
Jun 4, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch damage and ESL free dual damascene metal interconnect
Patent number
9,786,549
Issue date
Oct 10, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch damage and ESL free dual damascene metal interconnect
Patent number
9,318,377
Issue date
Apr 19, 2016
Taiwan Semiconductor Manufacutring Co., Ltd.
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Addition of carboxyl groups plasma during etching for interconnect...
Patent number
8,901,007
Issue date
Dec 2, 2014
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-Hsiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interconnection wires of semiconductor devices
Patent number
8,778,794
Issue date
Jul 15, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch damage and ESL free dual damascene metal interconnect
Patent number
8,652,962
Issue date
Feb 18, 2014
Taiwan Semiconductor Manufacturing Co., Ltd.
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Air gap for interconnect application
Patent number
7,682,963
Issue date
Mar 23, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Hai-Ching Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCH DAMAGE AND ESL FREE DUAL DAMASCENE METAL INTERCONNECT
Publication number
20220059404
Publication date
Feb 24, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH DAMAGE AND ESL FREE DUAL DAMASCENE METAL INTERCONNECT
Publication number
20190279896
Publication date
Sep 12, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH DAMAGE AND ESL FREE DUAL DAMASCENE METAL INTERCONNECT
Publication number
20180033684
Publication date
Feb 1, 2018
Taiwan Semiconductor Manufacturing Co., LTD
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH DAMAGE AND ESL FREE DUAL DAMASCENE METAL INTERCONNECT
Publication number
20160211174
Publication date
Jul 21, 2016
Taiwan Semiconductor Manufacturing Co., LTD
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADDITION OF CARBOXYL GROUPS PLASMA DURING ETCHING FOR INTERCONNECT...
Publication number
20140187044
Publication date
Jul 3, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Cheng-Hsiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERCONNECTION WIRES OF SEMICONDUCTOR DEVICES
Publication number
20140175650
Publication date
Jun 26, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH DAMAGE AND ESL FREE DUAL DAMASCENE METAL INTERCONNECT
Publication number
20140117561
Publication date
May 1, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH DAMAGE AND ESL FREE DUAL DAMASCENE METAL INTERCONNECT
Publication number
20130334700
Publication date
Dec 19, 2013
Taiwan Semiconductor Manufacturing Co., LTD
Sunil Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AIR GAP FOR INTERCONNECT APPLICATION
Publication number
20090091038
Publication date
Apr 9, 2009
Taiwan Semiconductor Manufacturing Company, Ltd.
Hai-Ching Chen
H01 - BASIC ELECTRIC ELEMENTS