TREA

Sunil Wickramanayaka

Follow

Person

  • Tokyo, JP
People

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER HOLDER AND METHOD OF HOLDING A WAFER
    • Publication number 20110253048
    • Publication date Oct 20, 2011
    • Canon ANELVA Corporation
    • Sunil Wickramanayaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Electrostatic chuck device
    • Publication number 20100046134
    • Publication date Feb 25, 2010
    • Canon ANELVA Corporation
    • Shigeru Mizuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS FOR DEPOSITING A HIGHER PERMITTIVITY DIELECTRI...
    • Publication number 20090218217
    • Publication date Sep 3, 2009
    • Canon ANELVA Corporation
    • Sunil Wickramanayaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTI-CATHODE IONIZED PHYSICAL VAPOR DEPOSITION SYSTEM
    • Publication number 20090194412
    • Publication date Aug 6, 2009
    • Canon ANELVA Corporation
    • Sunil Wickramanayaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTI-CATHODE IONIZED PHYSICAL VAPOR DEPOSITION SYSTEM
    • Publication number 20090194413
    • Publication date Aug 6, 2009
    • Canon ANELVA Corporation
    • Sunil Wickramanayaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF SPUTTERING A HIGH-K DIELECTRIC MATERIAL
    • Publication number 20090178917
    • Publication date Jul 16, 2009
    • Canon ANELVA Corporation
    • Sunil Wickramanayaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE TREATING SYSTEM FOR DEPOSITING A METAL GATE ON A HIGH-K...
    • Publication number 20090178621
    • Publication date Jul 16, 2009
    • Canon ANELVA Corporation
    • Wickramanayaka Sunil
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTI-CATHODE IONIZED PHYSICAL VAPOR DEPOSITION SYSTEM
    • Publication number 20090178920
    • Publication date Jul 16, 2009
    • Canon ANELVA Corporation
    • Sunil Wickramanayaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Electrostatic chuck device
    • Publication number 20090122459
    • Publication date May 14, 2009
    • ANELVA CORPORATION
    • Shigeru Mizuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Electrostatic chuck device
    • Publication number 20090059462
    • Publication date Mar 5, 2009
    • ANELVA CORPORATION
    • Shigeru Mizuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Wafer Holder And Method Of Holding A Wafer
    • Publication number 20060281314
    • Publication date Dec 14, 2006
    • Canon ANELVA Corporation
    • Sunil Wickramanayaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for depositing a metal gate on a high-k dielectric film and...
    • Publication number 20060194396
    • Publication date Aug 31, 2006
    • Canon ANELVA Corporation
    • Wickramanayaka Sunil
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Electrostatic chuck device
    • Publication number 20060158823
    • Publication date Jul 20, 2006
    • ANELVA CORPORATION
    • Shigeru Mizuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method of depositing a higher permittivity dielectric film
    • Publication number 20050272196
    • Publication date Dec 8, 2005
    • ANELVA CORPORATION
    • Sunil Wickramanayaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer Stage
    • Publication number 20050185359
    • Publication date Aug 25, 2005
    • ANELVA CORPORATION
    • Sunil Wickramanayaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma-Assisted Sputter Deposition System
    • Publication number 20050150457
    • Publication date Jul 14, 2005
    • ANELVA CORPORATION
    • Sunil Wickramanayaka
    • G11 - INFORMATION STORAGE
  • Information Patent Application

    Multi-cathode ionized physical vapor deposition system
    • Publication number 20050115827
    • Publication date Jun 2, 2005
    • ANELVA CORPORATION
    • Sunil Wickramanayaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Device for fixing a gas showerhead or target plate to an electrode...
    • Publication number 20050028935
    • Publication date Feb 10, 2005
    • ANELVA CORPORATION
    • Sunil Wickramanayaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Electrostatic chuck device
    • Publication number 20040040665
    • Publication date Mar 4, 2004
    • ANELVA CORPORATION
    • Shigeru Mizuno
    • H01 - BASIC ELECTRIC ELEMENTS