Sunny Wu

Person

Hsin-Chu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for tool condition monitoring based on a simulate...
- Patent number 10,047,439
- Issue date Aug 14, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Real-time calibration for wafer processing chamber lamp modules
- Patent number 9,698,065
- Issue date Jul 4, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tien Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and associated methods for tuning processing tools
- Patent number 9,519,285
- Issue date Dec 13, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng Tsai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Integrated circuit manufacturing tool condition monitoring system a...
- Patent number 9,349,660
- Issue date May 24, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing dispatch control
- Patent number 9,158,301
- Issue date Oct 13, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sunny Wu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Real-time calibration for wafer processing chamber lamp modules
- Patent number 9,159,597
- Issue date Oct 13, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tien Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adaptive and automatic determination of system parameters
- Patent number 9,141,097
- Issue date Sep 22, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng Tsai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor processing dispatch control
- Patent number 8,781,614
- Issue date Jul 15, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sunny Wu
- G05 - CONTROLLING REGULATING
Information Patent Grant
E-chuck with automated clamped force adjustment and calibration
- Patent number 8,685,759
- Issue date Apr 1, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jo Fei Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Adaptive and automatic determination of system parameters
- Patent number 8,606,387
- Issue date Dec 10, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng Tsai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Device performance parmeter tuning method and system
- Patent number 8,452,439
- Issue date May 28, 2013
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sunny Wu
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor processing dispatch control
- Patent number 8,295,965
- Issue date Oct 23, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sunny Wu
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for implementing wafer acceptance test (“WAT”) ad...
- Patent number 8,219,341
- Issue date Jul 10, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Andy Tsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical failure analysis guiding methods
- Patent number 8,205,173
- Issue date Jun 19, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sunny Wu
- G01 - MEASURING TESTING
Information Patent Grant
System and method for implementing a wafer acceptance test (“WAT”)...
- Patent number 8,108,060
- Issue date Jan 31, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Andy Tsen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for a bin ratio forecast at new tape out stage
- Patent number 8,082,055
- Issue date Dec 20, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for bin-based control
- Patent number 8,041,451
- Issue date Oct 18, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sunny Wu
- G05 - CONTROLLING REGULATING
Information Patent Grant
E-chuck for automated clamped force adjustment and calibration
- Patent number 7,851,233
- Issue date Dec 14, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jo Fei Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Surface modification of a porous organic material through the use o...
- Patent number 7,354,623
- Issue date Apr 8, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Ya Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus to enable accurate wafer prediction
- Patent number 7,144,297
- Issue date Dec 5, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G05 - CONTROLLING REGULATING
Information Patent Grant
Advanced process control approach for Cu interconnect wiring sheet...
- Patent number 7,083,495
- Issue date Aug 1, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun Hsien Lin
- B24 - GRINDING POLISHING
Information Patent Grant
Multi-phase pressure control valve for process chamber
- Patent number 6,843,264
- Issue date Jan 18, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Tien Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Real-Time Calibration for Wafer Processing Chamber Lamp Modules
- Publication number 20160027708
- Publication date Jan 28, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tien Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Processing Dispatch Control
- Publication number 20140303765
- Publication date Oct 9, 2014
- Sunny Wu
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
TOOL OPTIMIZING TUNING SYSTEMS AND ASSOCIATED METHODS
- Publication number 20140207271
- Publication date Jul 24, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng Tsai
- G05 - CONTROLLING REGULATING
Information Patent Application
ADAPTIVE AND AUTOMATIC DETERMINATION OF SYSTEM PARAMETERS
- Publication number 20140074258
- Publication date Mar 13, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng TSAI
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
REAL-TIME CALIBRATION FOR WAFER PROCESSING CHAMBER LAMP MODULES
- Publication number 20130306621
- Publication date Nov 21, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tien Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR TOOL CONDITION MONITORING
- Publication number 20130150997
- Publication date Jun 13, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED CIRCUIT MANUFACTURING TOOL CONDITION MONITORING SYSTEM A...
- Publication number 20130144419
- Publication date Jun 6, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Processing Dispatch Control
- Publication number 20130013097
- Publication date Jan 10, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sunny Wu
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
DEVICE PERFORMANCE PARMETER TUNING METHOD AND SYSTEM
- Publication number 20120239178
- Publication date Sep 20, 2012
- Taiwan Semiconductor Manufacturing Co., LTD
- Sunny Wu
- G01 - MEASURING TESTING
Information Patent Application
ADAPTIVE AND AUTOMATIC DETERMINATION OF SYSTEM PARAMETERS
- Publication number 20120130525
- Publication date May 24, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Feng TSAI
- G05 - CONTROLLING REGULATING
Information Patent Application
Semiconductor Processing Dispatch Control
- Publication number 20120016509
- Publication date Jan 19, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sunny Wu
- G05 - CONTROLLING REGULATING
Information Patent Application
Physical Failure Analysis Guiding Methods
- Publication number 20110314336
- Publication date Dec 22, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sunny Wu
- G01 - MEASURING TESTING
Information Patent Application
E-CHUCK WITH AUTOMATED CLAMPED FORCE ADJUSTMENT AND CALIBRATION
- Publication number 20110042006
- Publication date Feb 24, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jo Fei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR A BIN RATIO FORECAST AT NEW TAPE OUT STAGE
- Publication number 20110010215
- Publication date Jan 13, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR IMPLEMENTING A WAFER ACCEPTANCE TEST ("WAT")...
- Publication number 20100292824
- Publication date Nov 18, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Andy Tsen
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR BIN-BASED CONTROL
- Publication number 20100268367
- Publication date Oct 21, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sunny Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
E-CHUCK FOR AUTOMATED CLAMPED FORCE ADJUSTMENT AND CALIBRATION
- Publication number 20100248398
- Publication date Sep 30, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jo Fei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR IMPLEMENTING WAFER ACCEPTANCE TEST ("WAT") AD...
- Publication number 20100250172
- Publication date Sep 30, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Andy Tsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS TO ENABLE ACCURATE WAFER PREDICTION
- Publication number 20060252348
- Publication date Nov 9, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G05 - CONTROLLING REGULATING
Information Patent Application
Novel method and apparatus for integrating fault detection and real...
- Publication number 20060129257
- Publication date Jun 15, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Hsu Chen
- G05 - CONTROLLING REGULATING
Information Patent Application
Micro-etching method to replicate alignment marks for semiconductor...
- Publication number 20050282396
- Publication date Dec 22, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Liang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Surface modification of a porous organic material through the use o...
- Publication number 20050260402
- Publication date Nov 24, 2005
- Ching-Ya Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Advanced process control approach for Cu interconnect wiring sheet...
- Publication number 20050112997
- Publication date May 26, 2005
- Chun Hsien Lin
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and apparatus for controlling spatial distribution of RF pow...
- Publication number 20050031796
- Publication date Feb 10, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sunny Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi - phase pressure control valve for process chamber
- Publication number 20040118464
- Publication date Jun 24, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Tien Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Method and system for tool condition monitoring based on a simulate...

Real-time calibration for wafer processing chamber lamp modules

Systems and associated methods for tuning processing tools

Integrated circuit manufacturing tool condition monitoring system a...

Semiconductor processing dispatch control

Real-time calibration for wafer processing chamber lamp modules

Adaptive and automatic determination of system parameters

Semiconductor processing dispatch control

E-chuck with automated clamped force adjustment and calibration

Adaptive and automatic determination of system parameters

Device performance parmeter tuning method and system

Semiconductor processing dispatch control

System and method for implementing wafer acceptance test (“WAT”) ad...

Physical failure analysis guiding methods

System and method for implementing a wafer acceptance test (“WAT”)...

Method for a bin ratio forecast at new tape out stage

Method for bin-based control

E-chuck for automated clamped force adjustment and calibration

Surface modification of a porous organic material through the use o...

Method and apparatus to enable accurate wafer prediction

Advanced process control approach for Cu interconnect wiring sheet...

Multi-phase pressure control valve for process chamber

Patents Applicationslast 30 patents

Real-Time Calibration for Wafer Processing Chamber Lamp Modules

Semiconductor Processing Dispatch Control

TOOL OPTIMIZING TUNING SYSTEMS AND ASSOCIATED METHODS

ADAPTIVE AND AUTOMATIC DETERMINATION OF SYSTEM PARAMETERS

REAL-TIME CALIBRATION FOR WAFER PROCESSING CHAMBER LAMP MODULES

METHOD AND SYSTEM FOR TOOL CONDITION MONITORING

INTEGRATED CIRCUIT MANUFACTURING TOOL CONDITION MONITORING SYSTEM A...

Semiconductor Processing Dispatch Control

DEVICE PERFORMANCE PARMETER TUNING METHOD AND SYSTEM

ADAPTIVE AND AUTOMATIC DETERMINATION OF SYSTEM PARAMETERS

Semiconductor Processing Dispatch Control

Physical Failure Analysis Guiding Methods

E-CHUCK WITH AUTOMATED CLAMPED FORCE ADJUSTMENT AND CALIBRATION

METHOD FOR A BIN RATIO FORECAST AT NEW TAPE OUT STAGE

SYSTEM AND METHOD FOR IMPLEMENTING A WAFER ACCEPTANCE TEST ("WAT")...

METHOD FOR BIN-BASED CONTROL

E-CHUCK FOR AUTOMATED CLAMPED FORCE ADJUSTMENT AND CALIBRATION

SYSTEM AND METHOD FOR IMPLEMENTING WAFER ACCEPTANCE TEST ("WAT") AD...

METHOD AND APPARATUS TO ENABLE ACCURATE WAFER PREDICTION

Novel method and apparatus for integrating fault detection and real...

Micro-etching method to replicate alignment marks for semiconductor...

Surface modification of a porous organic material through the use o...

Advanced process control approach for Cu interconnect wiring sheet...

Method and apparatus for controlling spatial distribution of RF pow...

Multi - phase pressure control valve for process chamber