Suresh Santhanam

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Cranberry Township, PA, US

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Patents Grantslast 30 patents

Information Patent Grant
Encapsulation of MEMS devices using pillar-supported caps
- Patent number 7,153,717
- Issue date Dec 26, 2006
- IC Mechanics Inc.
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical structure and process of making same
- Patent number 5,970,315
- Issue date Oct 19, 1999
- Carnegie Mellon University
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical structure and process of making same
- Patent number 5,717,631
- Issue date Feb 10, 1998
- Carnegie Mellon University
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Encapsulation of MEMS devices using pillar-supported caps
- Publication number 20030153116
- Publication date Aug 14, 2003
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY