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Susan L. Cohen
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Austin, TX, US
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last 30 patents
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Patent Grant
Method for making silica strain test structures
Patent number
5,899,701
Issue date
May 4, 1999
Siemens Aktiengesellschaft
Russ Arndt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vapor drying system and method
Patent number
5,815,942
Issue date
Oct 6, 1998
Kabushiki Kaisha Toshiba
Jin Jwang Wu
F26 - DRYING
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Patent Grant
Control of gas content in process liquids for improved megasonic cl...
Patent number
5,800,626
Issue date
Sep 1, 1998
International Business Machines Corporation
Susan Cohen
B08 - CLEANING
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Patent Grant
Process for removing residue from a semiconductor wafer after chemi...
Patent number
5,704,987
Issue date
Jan 6, 1998
International Business Machines Corporation
Cuc Kim Huynh
B08 - CLEANING