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Susanne Beder
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Imaging optical unit for imaging an object field into an image field
Patent number
11,119,413
Issue date
Sep 14, 2021
Carl Zeiss SMT GmbH
Johannes Ruoff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging optical unit for a metrology system for examining a lithogr...
Patent number
10,606,048
Issue date
Mar 31, 2020
Carl Zeiss SMT GmbH
Johannes Ruoff
G02 - OPTICS
Information
Patent Grant
Imaging optical unit for a projection exposure apparatus
Patent number
9,459,539
Issue date
Oct 4, 2016
Carl Zeiss SMT GmbH
Hans-Juergen Mann
G02 - OPTICS
Information
Patent Grant
Projection lens system of a microlithographic projection exposure i...
Patent number
9,164,396
Issue date
Oct 20, 2015
Carl Zeiss SMT GmbH
Helmut Beierl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion catadioptric projection objective having two intermediate...
Patent number
8,908,269
Issue date
Dec 9, 2014
Carl Zeiss SMT GmbH
David R. Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,730,572
Issue date
May 20, 2014
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,416,490
Issue date
Apr 9, 2013
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,355,201
Issue date
Jan 15, 2013
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Projection objective of a microlithographic projection exposure app...
Patent number
8,325,426
Issue date
Dec 4, 2012
Carl Zeiss SMT GmbH
Karl-Heinz Schuster
G02 - OPTICS
Information
Patent Grant
Projection lens system of a microlithographic projection exposure i...
Patent number
8,319,944
Issue date
Nov 27, 2012
Carl Zeiss SMT GmbH
Helmut Beierl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Catadioptric projection objective
Patent number
8,208,199
Issue date
Jun 26, 2012
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,208,198
Issue date
Jun 26, 2012
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,199,400
Issue date
Jun 12, 2012
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Projection objective for lithography
Patent number
8,068,276
Issue date
Nov 29, 2011
Carl Zeiss SMT GmbH
Heiko Feldmann
G02 - OPTICS
Information
Patent Grant
Illumination system or projection lens of a microlithographic expos...
Patent number
8,031,326
Issue date
Oct 4, 2011
Carl Zeiss SMT GmbH
Michael Totzeck
G02 - OPTICS
Information
Patent Grant
Projection objective of a microlithographic projection exposure app...
Patent number
7,982,969
Issue date
Jul 19, 2011
Carl Zeiss SMT GmbH
Karl-Heinz Schuster
G02 - OPTICS
Information
Patent Grant
Hologram and method of manufacturing an optical element using a hol...
Patent number
7,848,031
Issue date
Dec 7, 2010
Carl Zeiss SMT AG
Jochen Hetzler
G01 - MEASURING TESTING
Information
Patent Grant
Projection objective for lithography
Patent number
7,835,073
Issue date
Nov 16, 2010
Carl Zeiss SMT AG
Heiko Feldmann
G02 - OPTICS
Information
Patent Grant
Projection objective having a high aperture and a planar end surface
Patent number
7,782,538
Issue date
Aug 24, 2010
Carl Zeiss SMT AG
Susanne Beder
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Projection lens system of a microlithographic projection exposure i...
Patent number
7,782,440
Issue date
Aug 24, 2010
Carl Zeiss SMT AG
Helmut Beierl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing an optical element
Patent number
7,728,987
Issue date
Jun 1, 2010
Carl Zeiss SMT AG
Ralf Arnold
G01 - MEASURING TESTING
Information
Patent Grant
Imaging system for a microlithographical projection light system
Patent number
7,719,658
Issue date
May 18, 2010
Carl Zeiss SMT AG
Andreas Dorsel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection objective of a microlithographic projection exposure app...
Patent number
7,710,640
Issue date
May 4, 2010
Carl Zeiss SMT AG
Susanne Beder
G02 - OPTICS
Information
Patent Grant
Projection objective adapted for use with different immersion fluid...
Patent number
7,589,903
Issue date
Sep 15, 2009
Carl Zeiss SMT AG
Susanne Beder
G02 - OPTICS
Information
Patent Grant
Microlithographic projection exposure apparatus
Patent number
7,570,343
Issue date
Aug 4, 2009
Carl Zeis SMT AG
Aurelian Dodoc
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Arrangement of optical elements in a microlithographic projection e...
Patent number
7,474,469
Issue date
Jan 6, 2009
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Information
Patent Grant
Projection objective having a high aperture and a planar end surface
Patent number
7,466,489
Issue date
Dec 16, 2008
Susanne Beder
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Objectives as a microlithography projection objective with at least...
Patent number
7,428,105
Issue date
Sep 23, 2008
Carl Zeiss SMT AG
David R. Shafer
G02 - OPTICS
Information
Patent Grant
Objectives as a microlithography projection objective with at least...
Patent number
7,385,764
Issue date
Jun 10, 2008
Carl Zeiss SMT AG
David R. Shafer
G02 - OPTICS
Information
Patent Grant
Projection optical system and method
Patent number
7,301,707
Issue date
Nov 27, 2007
Carl Zeiss SMT AG
Dave Shafer
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
HEATING ARRANGEMENT AND METHOD FOR HEATING AN OPTICAL ELEMENT
Publication number
20240069453
Publication date
Feb 29, 2024
Carl Zeiss SMT GMBH
Susanne Beder
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM, HEATING ARRANGEMENT, AND METHOD FOR HEATING AN OPTI...
Publication number
20220299732
Publication date
Sep 22, 2022
Carl Zeiss SMT GMBH
Andrea Berner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD
Publication number
20200218045
Publication date
Jul 9, 2020
Carl Zeiss SMT GMBH
Johannes Ruoff
G02 - OPTICS
Information
Patent Application
IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGR...
Publication number
20170131528
Publication date
May 11, 2017
Carl Zeiss SMT GMBH
Johannes Ruoff
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20160274343
Publication date
Sep 22, 2016
Carl Zeiss SMT GMBH
David R. Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20150055214
Publication date
Feb 26, 2015
Carl Zeiss SMT GMBH
David R. Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20140111787
Publication date
Apr 24, 2014
David R. Shafer
G02 - OPTICS
Information
Patent Application
IMAGING OPTICAL UNIT FOR A PROJECTION EXPOSURE APPARATUS
Publication number
20140038110
Publication date
Feb 6, 2014
Hans-Juergen Mann
G02 - OPTICS
Information
Patent Application
PROJECTION LENS SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE I...
Publication number
20130070224
Publication date
Mar 21, 2013
Carl Zeiss SMT GMBH
Helmut Beierl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20120250147
Publication date
Oct 4, 2012
David Shafer
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
Publication number
20110235013
Publication date
Sep 29, 2011
Carl Zeiss SMT GMBH
Karl-Heinz Schuster
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE AP...
Publication number
20110228246
Publication date
Sep 22, 2011
Carl Zeiss SMT AG
Bernhard Kneer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20110211252
Publication date
Sep 1, 2011
David Shafer
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE FOR LITHOGRAPHY
Publication number
20110026110
Publication date
Feb 3, 2011
Carl Zeiss SMT AG
Heiko Feldmann
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20100265572
Publication date
Oct 21, 2010
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
PROJECTION LENS SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE I...
Publication number
20100265478
Publication date
Oct 21, 2010
Carl Zeiss SMT AG
Helmut Beierl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20100014153
Publication date
Jan 21, 2010
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
Publication number
20090284831
Publication date
Nov 19, 2009
Carl Zeiss SMT AG
Karl-Heinz Schuster
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20090190208
Publication date
Jul 30, 2009
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE HAVING A HIGH APERTURE AND A PLANAR END SURFACE
Publication number
20090059385
Publication date
Mar 5, 2009
Carl Zeiss SMT AG
Susanne Beder
G02 - OPTICS
Information
Patent Application
PROJECTION LENS OF A MICROLITHOGRAPHIC EXPOSURE SYSTEM
Publication number
20090021830
Publication date
Jan 22, 2009
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE AP...
Publication number
20080304033
Publication date
Dec 11, 2008
Carl Zeiss SMT AG
Bernhard Kneer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
Publication number
20080278799
Publication date
Nov 13, 2008
Carl Zeiss SMT AG
Susanne Beder
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE ADAPTED FOR USE WITH DIFFERENT IMMERSION FLUID...
Publication number
20080273248
Publication date
Nov 6, 2008
Carl Zeiss SMT AG
Susanne Beder
G02 - OPTICS
Information
Patent Application
ILLUMINATION SYSTEM OR PROJECTION LENS OF A MICROLITHOGRAPHIC EXPOS...
Publication number
20080204877
Publication date
Aug 28, 2008
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE FOR LITHOGRAPHY
Publication number
20080174858
Publication date
Jul 24, 2008
Carl Zeiss SMT AG
Heiko Feldmann
G02 - OPTICS
Information
Patent Application
Hologram and Method of Manufacturing an Optical Element Using a Hol...
Publication number
20080137090
Publication date
Jun 12, 2008
Carl Zeiss SMT AG
Jochen Hetzler
G01 - MEASURING TESTING
Information
Patent Application
Projection Lens System of a Microlithographic Projection Exposure I...
Publication number
20080106711
Publication date
May 8, 2008
Carl Zeiss SMT AG
Helmut Beierl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OPTICAL SYSTEM AND METHOD
Publication number
20080068705
Publication date
Mar 20, 2008
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
Method of Manufacturing an Optical Element
Publication number
20080043247
Publication date
Feb 21, 2008
Carl Zeiss SMT AG
Ralf Arnold
G01 - MEASURING TESTING