Susumu Aiuchi

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing pad surface condition evaluation method and an apparatus...
- Patent number 7,020,306
- Issue date Mar 28, 2006
- Hitachi, Ltd.
- Takenori Hirose
- B24 - GRINDING POLISHING
Information Patent Grant
Image display device and its repairing method and apparatus
- Patent number 6,693,699
- Issue date Feb 17, 2004
- Hitachi, Ltd.
- Takashi Inoue
- G02 - OPTICS
Information Patent Grant
Image display device and its repairing method and apparatus
- Patent number 6,552,771
- Issue date Apr 22, 2003
- Hitachi, Ltd.
- Takashi Inoue
- G02 - OPTICS
Information Patent Grant
Cleaning apparatus for plate-like part and method thereof
- Patent number 6,539,959
- Issue date Apr 1, 2003
- Hitachi, Ltd.
- Noriyuki Ohroku
- G11 - INFORMATION STORAGE
Information Patent Grant
Apparatus and method for measuring the depth of fine engraved patterns
- Patent number RE33424
- Issue date Nov 6, 1990
- Hitachi, Ltd.
- Minori Noguchi
- 356 - Optics: measuring and testing
Information Patent Grant
Method and apparatus for correcting defects of X-ray mask
- Patent number 4,933,565
- Issue date Jun 12, 1990
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of correcting defect in circuit pattern
- Patent number 4,925,755
- Issue date May 15, 1990
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring apparatus for etching pits
- Patent number 4,840,487
- Issue date Jun 20, 1989
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing method and apparatus for carrying out the same
- Patent number 4,808,258
- Issue date Feb 28, 1989
- Hitachi, Ltd.
- Toru Otsubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for measuring difference in shallow level
- Patent number 4,744,660
- Issue date May 17, 1988
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for microwave assisting sputtering
- Patent number 4,721,553
- Issue date Jan 26, 1988
- Hitachi, Ltd.
- Hiroshi Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous sputtering apparatus
- Patent number 4,675,096
- Issue date Jun 23, 1987
- Hitachi, Ltd.
- Hideki Tateishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern checking apparatus
- Patent number 4,628,531
- Issue date Dec 9, 1986
- Hitachi, Ltd.
- Keiichi Okamoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for measuring the depth of fine engraved patterns
- Patent number 4,615,620
- Issue date Oct 7, 1986
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for sputtering
- Patent number 4,610,770
- Issue date Sep 9, 1986
- Hitachi, Ltd.
- Hiroshi Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming tapered films
- Patent number 4,536,419
- Issue date Aug 20, 1985
- Hitachi, Ltd.
- Hitoshi Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry-etching apparatus
- Patent number 4,487,678
- Issue date Dec 11, 1984
- Hitachi, Ltd.
- Minori Noguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and apparatus
- Patent number 4,479,848
- Issue date Oct 30, 1984
- Hitachi, Ltd.
- Toru Otsubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Projecting apparatus
- Patent number 4,420,233
- Issue date Dec 13, 1983
- Hitachi, Ltd.
- Mineo Nomoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for performing continuous treatment in vacuum
- Patent number 4,405,435
- Issue date Sep 20, 1983
- Hitachi, Ltd.
- Hideki Tateishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering cathode structure for sputtering apparatuses, method of...
- Patent number 4,401,539
- Issue date Aug 30, 1983
- Hitachi, Ltd.
- Katsuo Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light exposure device and method
- Patent number 4,391,511
- Issue date Jul 5, 1983
- Hitachi, Ltd.
- Nobuyuki Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus
- Patent number 4,170,418
- Issue date Oct 9, 1979
- Hitachi, Ltd.
- Susumu Aiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Display apparatus for displaying property of electronic appliance
- Publication number 20030231145
- Publication date Dec 18, 2003
- Hitachi, Ltd
- Kouichi Uesaka
- G01 - MEASURING TESTING
Information Patent Application
Image display device and its repairing method and apparatus
- Publication number 20030002008
- Publication date Jan 2, 2003
- Takashi Inoue
- G02 - OPTICS
Information Patent Application
Polishing pad surface condition evaluation method and an apparatus...
- Publication number 20010015801
- Publication date Aug 23, 2001
- Takenori Hirose
- G01 - MEASURING TESTING

Susumu Aiuchi

Person

Patents Grantslast 30 patents

Polishing pad surface condition evaluation method and an apparatus...

Image display device and its repairing method and apparatus

Image display device and its repairing method and apparatus

Cleaning apparatus for plate-like part and method thereof

Apparatus and method for measuring the depth of fine engraved patterns

Method and apparatus for correcting defects of X-ray mask

Method of correcting defect in circuit pattern

Measuring apparatus for etching pits

Plasma processing method and apparatus for carrying out the same

Apparatus for measuring difference in shallow level

Method and apparatus for microwave assisting sputtering

Continuous sputtering apparatus

Pattern checking apparatus

Apparatus for measuring the depth of fine engraved patterns

Method and apparatus for sputtering

Method for forming tapered films

Dry-etching apparatus

Etching method and apparatus

Projecting apparatus

Apparatus for performing continuous treatment in vacuum

Sputtering cathode structure for sputtering apparatuses, method of...

Light exposure device and method

Alignment apparatus

Patents Applicationslast 30 patents

Display apparatus for displaying property of electronic appliance

Image display device and its repairing method and apparatus

Polishing pad surface condition evaluation method and an apparatus...