TREA

Susumu Akiyama

Follow

Person

  • Tokyo, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Reactive sputtering apparatus
    • Patent number 9,905,401
    • Issue date Feb 27, 2018
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,779,921
    • Issue date Oct 3, 2017
    • Canon Anelva Corporation
    • Yoshimitsu Shimane
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputtering apparatus
    • Patent number 9,034,152
    • Issue date May 19, 2015
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 8,147,664
    • Issue date Apr 3, 2012
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate heating apparatus and semiconductor fabrication method
    • Patent number 7,807,553
    • Issue date Oct 5, 2010
    • Canon Anelva Corporation
    • Masami Shibagaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and system for forming copper thin film
    • Patent number 6,726,954
    • Issue date Apr 27, 2004
    • Anelva Corporation
    • Minjuan Zhang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150294845
    • Publication date Oct 15, 2015
    • Canon ANELVA Corporation
    • Yoshimitsu SHIMANE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REACTIVE SPUTTERING APPARATUS
    • Publication number 20150206714
    • Publication date Jul 23, 2015
    • Canon ANELVA Corporation
    • NOBUO YAMAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REACTIVE SPUTTERING APPARATUS
    • Publication number 20120152736
    • Publication date Jun 21, 2012
    • Canon ANELVA Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20100243438
    • Publication date Sep 30, 2010
    • Canon ANELVA Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE HEATING APPARATUS AND SEMICONDUCTOR FABRICATION METHOD
    • Publication number 20080213988
    • Publication date Sep 4, 2008
    • Canon ANELVA Corporation
    • Masami Shibagaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method and system for forming copper thin film
    • Publication number 20020052109
    • Publication date May 2, 2002
    • Minjuan Zhang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...