Susumu Gotoh

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam writing equipment and electron beam writing method
- Patent number 7,049,607
- Issue date May 23, 2006
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure equipment and electron beam exposure method
- Patent number 6,838,682
- Issue date Jan 4, 2005
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam writing equipment and electron beam writing method
- Patent number 6,809,319
- Issue date Oct 26, 2004
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure apparatus and method, and device manufacturi...
- Patent number 6,323,499
- Issue date Nov 27, 2001
- Canon Kabushiki Kaisha
- Masato Muraki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure apparatus and method
- Patent number 6,166,387
- Issue date Dec 26, 2000
- Canon Kabushiki Kaisha
- Masato Muraki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure method, and device manufacturing method usin...
- Patent number 5,973,332
- Issue date Oct 26, 1999
- Canon Kabushiki Kaisha
- Masato Muraki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure apparatus and method, and device manufacturi...
- Patent number 5,834,783
- Issue date Nov 10, 1998
- Canon Kabushiki Kaisha
- Masato Muraki
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Electron beam writing equipment and electron beam writing method
- Publication number 20050040343
- Publication date Feb 24, 2005
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron beam writing equipment and electron beam writing method
- Publication number 20040129898
- Publication date Jul 8, 2004
- Yasunari Sohda
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron beam exposure equipment and electron beam exposure method
- Publication number 20040119026
- Publication date Jun 24, 2004
- Yasunari Sohda
- B82 - NANO-TECHNOLOGY

Susumu Gotoh

Person

Patents Grantslast 30 patents

Electron beam writing equipment and electron beam writing method

Electron beam exposure equipment and electron beam exposure method

Electron beam writing equipment and electron beam writing method

Electron beam exposure apparatus and method, and device manufacturi...

Electron beam exposure apparatus and method

Electron beam exposure method, and device manufacturing method usin...

Electron beam exposure apparatus and method, and device manufacturi...

Patents Applicationslast 30 patents

Electron beam writing equipment and electron beam writing method

Electron beam writing equipment and electron beam writing method

Electron beam exposure equipment and electron beam exposure method