Susumu HAYAKAWA

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Kikuchi-gun, Kumamoto, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240082956
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Susumu HAYAKAWA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
REPLACING APPARATUS AND REPLACING METHOD
- Publication number 20230264309
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Yasutaka MIZOMOTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING APPARATUS, AND INSTALLING METHOD OF PROCESSING TOOL OF P...
- Publication number 20230182253
- Publication date Jun 15, 2023
- TOKYO ELECTRON LIMITED
- Yasutaka MIZOMOTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR