Susumu HAYAKAWA

Person

Kikuchi-gun, Kumamoto, JP

People

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING SYSTEM, ELECTROSTATIC CARRIER, AND PROCESSING METHOD
- Publication number 20240429073
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- Susumu HAYAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240412976
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Susumu HAYAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20240331998
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Susumu HAYAKAWA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240082956
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Susumu HAYAKAWA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
REPLACING APPARATUS AND REPLACING METHOD
- Publication number 20230264309
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Yasutaka MIZOMOTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING APPARATUS, AND INSTALLING METHOD OF PROCESSING TOOL OF P...
- Publication number 20230182253
- Publication date Jun 15, 2023
- TOKYO ELECTRON LIMITED
- Yasutaka MIZOMOTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Susumu HAYAKAWA

Person

Patents Applicationslast 30 patents

PROCESSING SYSTEM, ELECTROSTATIC CARRIER, AND PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

REPLACING APPARATUS AND REPLACING METHOD

PROCESSING APPARATUS, AND INSTALLING METHOD OF PROCESSING TOOL OF P...