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Susumu Kato
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Defective product inspection apparatus, probe positioning method an...
Patent number
8,074,293
Issue date
Dec 6, 2011
Hitachi High-Technologies Corporation
Eiichi Hazaki
G01 - MEASURING TESTING
Information
Patent Grant
Specimen holding device and charged particle beam device
Patent number
7,772,567
Issue date
Aug 10, 2010
Hitachi High-Technologies Corporation
Susumu Kato
G01 - MEASURING TESTING
Information
Patent Grant
Defective product inspection apparatus, probe positioning method an...
Patent number
7,553,334
Issue date
Jun 30, 2009
Hitachi High-Technologies Corporation
Eiichi Hazaki
G01 - MEASURING TESTING
Information
Patent Grant
Defective product inspection apparatus, probe positioning method an...
Patent number
7,297,945
Issue date
Nov 20, 2007
Hitachi High-Technologies Corporation
Eiichi Hazaki
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
DEFECTIVE PRODUCT INSPECTION APPARATUS, PROBE POSITIONING METHOD AN...
Publication number
20090230984
Publication date
Sep 17, 2009
Hitachi High-Technologies Corporation
Eiichi Hazaki
G01 - MEASURING TESTING
Information
Patent Application
Defective product inspection apparatus, probe positioning method an...
Publication number
20080048699
Publication date
Feb 28, 2008
Hitachi High-Technologies Corporation
Eiichi Hazaki
G01 - MEASURING TESTING
Information
Patent Application
Specimen holding device and charged particle beam device
Publication number
20070210261
Publication date
Sep 13, 2007
Susumu Kato
G01 - MEASURING TESTING
Information
Patent Application
Defective product inspection apparatus, probe positioning method an...
Publication number
20050139781
Publication date
Jun 30, 2005
Eiichi Hazaki
G01 - MEASURING TESTING