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Susumu Kato

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  • Yamanashi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Apparatus and method for regulating pressure in two chambers
    • Patent number 5,913,978
    • Issue date Jun 22, 1999
    • Tokyo Electron Ltd.
    • Susumu Kato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vacuum process apparaus
    • Patent number 5,609,689
    • Issue date Mar 11, 1997
    • Tokyo Electron Limited
    • Susumu Kato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Heat treating apparatus
    • Patent number 5,088,697
    • Issue date Feb 18, 1992
    • Tokyo Electron Limited
    • Seishi Murakami
    • C30 - CRYSTAL GROWTH