Susumu Koyama

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Hitachinaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus
- Patent number 10,755,890
- Issue date Aug 25, 2020
- HITACHI HIGH-TECH CORPORATION
- Shinya Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle microscope and measurement image correction method...
- Patent number 8,957,959
- Issue date Feb 17, 2015
- Hitachi High-Technologies Corporation
- Shuangqi Dong
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Pattern measuring apparatus
- Patent number 8,872,106
- Issue date Oct 28, 2014
- Hitachi High-Technologies Corporation
- Hiroshi Nishihama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measuring apparatus
- Patent number 8,618,517
- Issue date Dec 31, 2013
- Hitachi High-Technologies Corporation
- Hiroshi Nishihama
Information Patent Grant
Pattern defect analysis equipment, pattern defect analysis method a...
- Patent number 8,280,148
- Issue date Oct 2, 2012
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern defect analysis equipment, pattern defect analysis method a...
- Patent number 8,121,393
- Issue date Feb 21, 2012
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20180286627
- Publication date Oct 4, 2018
- Hitachi High-Technologies Corporation
- Shinya UENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN MEASURING APPARATUS
- Publication number 20140021350
- Publication date Jan 23, 2014
- Hitachi High-Technologies Corporation
- Hiroshi Nishihama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN MEASURING APPARATUS
- Publication number 20140021349
- Publication date Jan 23, 2014
- Hitachi High-Technologies Corporation
- Hiroshi Nishihama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE MICROSCOPE AND MEASUREMENT IMAGE CORRECTION METHOD...
- Publication number 20130300854
- Publication date Nov 14, 2013
- Hitachi High-Technologies Corporation
- Shuangqi Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD A...
- Publication number 20120114221
- Publication date May 10, 2012
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD A...
- Publication number 20090180680
- Publication date Jul 16, 2009
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING