Susumu Makinouchi

Person

Chiyodu-ku, Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Encoder apparatus using liquid to suppress detection failure
- Patent number 8,796,613
- Issue date Aug 5, 2014
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus, exposure method, and device fabrication method
- Patent number 8,797,506
- Issue date Aug 5, 2014
- Nikon Corporation
- Motokatsu Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Movable body apparatus, exposure apparatus and pattern formation ap...
- Patent number 8,760,622
- Issue date Jun 24, 2014
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Encoder that optically detects positional information of a moving b...
- Patent number 8,710,425
- Issue date Apr 29, 2014
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Encoder that detects positional information of a moving body genera...
- Patent number 8,710,426
- Issue date Apr 29, 2014
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Encoder apparatus using liquid to suppress detection failure
- Patent number 8,395,110
- Issue date Mar 12, 2013
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Movable-body apparatus, exposure apparatus, exposure method, and de...
- Patent number 8,390,780
- Issue date Mar 5, 2013
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus, exposure method, and device fabrication method
- Patent number 8,272,544
- Issue date Sep 25, 2012
- Nikon Corporation
- Motokatsu Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Encoder that optically detects positional information of a movable...
- Patent number 8,222,594
- Issue date Jul 17, 2012
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Position measuring system and position measuring method, Movable bo...
- Patent number 8,208,128
- Issue date Jun 26, 2012
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Immersion exposure apparatus and device manufacturing method with n...
- Patent number 8,064,037
- Issue date Nov 22, 2011
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion exposure apparatus and device manufacturing method with n...
- Patent number 7,961,289
- Issue date Jun 14, 2011
- Nikon Corporation
- Hiroyuki Nagasaka
Information Patent Grant
Exposure apparatus, exposure method, and device fabrication method
- Patent number 7,932,996
- Issue date Apr 26, 2011
- Nikon Corporation
- Motokatsu Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positional information detecting device
- Patent number 7,723,671
- Issue date May 25, 2010
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Encoder that optically detects positional information of a scale
- Patent number 7,601,947
- Issue date Oct 13, 2009
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning exposure apparatus and method with run-up distance control
- Patent number 6,646,715
- Issue date Nov 11, 2003
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and method
- Patent number 6,633,363
- Issue date Oct 14, 2003
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,490,025
- Issue date Dec 3, 2002
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus including a motor-driven stage for exposing a photosensit...
- Patent number 6,337,733
- Issue date Jan 8, 2002
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage control with reduced synchronization error and settling time
- Patent number 6,260,282
- Issue date Jul 17, 2001
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning type exposure apparatus
- Patent number 6,259,511
- Issue date Jul 10, 2001
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,188,464
- Issue date Feb 13, 2001
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method in which mask stage is mov...
- Patent number 5,978,071
- Issue date Nov 2, 1999
- Nikon Corporation
- Hideyuki Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and method
- Patent number 5,969,800
- Issue date Oct 19, 1999
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,907,392
- Issue date May 25, 1999
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and method
- Patent number 5,877,845
- Issue date Mar 2, 1999
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus with control of a linear motor
- Patent number 5,777,721
- Issue date Jul 7, 1998
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and projection exposure method
- Patent number 5,742,376
- Issue date Apr 21, 1998
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device capable of applying a damping force to a movable member
- Patent number 5,714,860
- Issue date Feb 3, 1998
- Nikon Corporation
- Susumu Makinouchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Scanning type exposure apparatus
- Patent number 5,699,145
- Issue date Dec 16, 1997
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LIGHT IRRADIATION SYSTEM, CONTROL APPARATUS, LIGHT IRRADIATION CONT...
- Publication number 20190029090
- Publication date Jan 24, 2019
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Yuzuru Ikehara
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
IMAGE PROCESSING SYSTEM, IMAGE PROCESSING APPARATUS, PROJECTING APP...
- Publication number 20180288404
- Publication date Oct 4, 2018
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Yuzuru IKEHARA
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD
- Publication number 20170299966
- Publication date Oct 19, 2017
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING PROJECTION APPARATUS, PROJECTION METHOD, SURGERY SUPPORT S...
- Publication number 20170079741
- Publication date Mar 23, 2017
- Nikon Corporation
- Susumu MAKINOUCHI
- G01 - MEASURING TESTING
Information Patent Application
IMAGING SYSTEM AND IMAGING METHOD
- Publication number 20160139039
- Publication date May 19, 2016
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Yuzuru IKEHARA
- G01 - MEASURING TESTING
Information Patent Application
ENCODER APPARATUS USING LIQUID TO SUPPRESS DETECTION FAILURE
- Publication number 20130087696
- Publication date Apr 11, 2013
- Nikon Corporation
- Susumu MAKINOUCHI
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD
- Publication number 20120320350
- Publication date Dec 20, 2012
- Nikon Corporation
- Motokatsu Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENCODER
- Publication number 20120292539
- Publication date Nov 22, 2012
- Nikon Corporation
- Susumu MAKINOUCHI
- G01 - MEASURING TESTING
Information Patent Application
ENCODER
- Publication number 20110272565
- Publication date Nov 10, 2011
- Nikon Corporation
- Susumu MAKINOUCHI
- G01 - MEASURING TESTING
Information Patent Application
ENCODER
- Publication number 20110192964
- Publication date Aug 11, 2011
- Nikon Corporation
- Susumu MAKINOUCHI
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus, exposure method, and device fabrication method
- Publication number 20110189613
- Publication date Aug 4, 2011
- Nikon Corporation
- Motokatsu Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENCODER
- Publication number 20100176282
- Publication date Jul 15, 2010
- Nikon Corporation
- Susumu MAKINOUCHI
- G02 - OPTICS
Information Patent Application
ENCODER APPARATUS
- Publication number 20100171030
- Publication date Jul 8, 2010
- Nikon Corporation
- Susumu MAKINOUCHI
- G01 - MEASURING TESTING
Information Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND PATTERN FORMATION AP...
- Publication number 20090273767
- Publication date Nov 5, 2009
- Nikon Corporation
- Susumu MAKINOUCHI
- G01 - MEASURING TESTING
Information Patent Application
ENCODER
- Publication number 20090267781
- Publication date Oct 29, 2009
- Nikon Corporation
- Susumu MAKINOUCHI
- G01 - MEASURING TESTING
Information Patent Application
POSITION MEASURING SYSTEM AND POSITION MEASURING METHOD, MOVABLE BO...
- Publication number 20090262321
- Publication date Oct 22, 2009
- Nikon Corporation
- Susumu MAKINOUCHI
- G01 - MEASURING TESTING
Information Patent Application
MOVABLE-BODY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DE...
- Publication number 20090135388
- Publication date May 28, 2009
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Application
ENCODER
- Publication number 20080258050
- Publication date Oct 23, 2008
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Application
Encoder
- Publication number 20080185506
- Publication date Aug 7, 2008
- Sendai Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Application
Encoder
- Publication number 20070267571
- Publication date Nov 22, 2007
- Nikon Corporation
- Susumu Makinouchi
- G01 - MEASURING TESTING
Information Patent Application
Anti-Gravity Device for Supporting Weight and Reducing Transmissibi...
- Publication number 20070236854
- Publication date Oct 11, 2007
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Active damper with counter mass to compensate for structural vibrat...
- Publication number 20070097340
- Publication date May 3, 2007
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and device fabrication method
- Publication number 20070002299
- Publication date Jan 4, 2007
- Nikon Corporation
- Motokatsu Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method and device manufacturing method
- Publication number 20060139593
- Publication date Jun 29, 2006
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Feedforward control with reduced learning time for lithographic sys...
- Publication number 20050231706
- Publication date Oct 20, 2005
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Control system and method for improving tracking accuracy of a stag...
- Publication number 20040128918
- Publication date Jul 8, 2004
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Susumu Makinouchi

Person

Patents Grantslast 30 patents

Encoder apparatus using liquid to suppress detection failure

Exposure apparatus, exposure method, and device fabrication method

Movable body apparatus, exposure apparatus and pattern formation ap...

Encoder that optically detects positional information of a moving b...

Encoder that detects positional information of a moving body genera...

Encoder apparatus using liquid to suppress detection failure

Movable-body apparatus, exposure apparatus, exposure method, and de...

Exposure apparatus, exposure method, and device fabrication method

Encoder that optically detects positional information of a movable...

Position measuring system and position measuring method, Movable bo...

Immersion exposure apparatus and device manufacturing method with n...

Immersion exposure apparatus and device manufacturing method with n...

Exposure apparatus, exposure method, and device fabrication method

Positional information detecting device

Encoder that optically detects positional information of a scale

Scanning exposure apparatus and method with run-up distance control

Scanning exposure apparatus and method

Exposure apparatus

Apparatus including a motor-driven stage for exposing a photosensit...

Stage control with reduced synchronization error and settling time

Scanning type exposure apparatus

Exposure apparatus

Projection exposure apparatus and method in which mask stage is mov...

Scanning exposure apparatus and method

Exposure apparatus

Scanning exposure apparatus and method

Exposure method and apparatus with control of a linear motor

Projection exposure apparatus and projection exposure method

Stage device capable of applying a damping force to a movable member

Scanning type exposure apparatus

Patents Applicationslast 30 patents

LIGHT IRRADIATION SYSTEM, CONTROL APPARATUS, LIGHT IRRADIATION CONT...

IMAGE PROCESSING SYSTEM, IMAGE PROCESSING APPARATUS, PROJECTING APP...

EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD

SCANNING PROJECTION APPARATUS, PROJECTION METHOD, SURGERY SUPPORT S...

IMAGING SYSTEM AND IMAGING METHOD

ENCODER APPARATUS USING LIQUID TO SUPPRESS DETECTION FAILURE

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD

ENCODER

ENCODER

ENCODER

Exposure apparatus, exposure method, and device fabrication method

ENCODER

ENCODER APPARATUS

MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND PATTERN FORMATION AP...

ENCODER

POSITION MEASURING SYSTEM AND POSITION MEASURING METHOD, MOVABLE BO...

MOVABLE-BODY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DE...

ENCODER

Encoder

Encoder

Anti-Gravity Device for Supporting Weight and Reducing Transmissibi...

Active damper with counter mass to compensate for structural vibrat...

Exposure apparatus, exposure method, and device fabrication method

Exposure apparatus, exposure method and device manufacturing method

Feedforward control with reduced learning time for lithographic sys...

Control system and method for improving tracking accuracy of a stag...