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Susumu Nakamura
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Higashijou-machi, Nagano-shi, Nagano-ken, JP
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last 30 patents
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Patent Grant
Method of manufacturing a bonding substrate
Patent number
6,110,391
Issue date
Aug 29, 2000
Shin-Etsu Handotai Co., Ltd.
Tokio Takei
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer holding jig
Patent number
5,938,512
Issue date
Aug 17, 1999
Shin-Etsu Handotai Co., Ltd.
Tokio Takei
B24 - GRINDING POLISHING
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Patent Grant
Bonded wafer and method of manufacturing it
Patent number
5,340,435
Issue date
Aug 23, 1994
Yatsuo Ito
H01 - BASIC ELECTRIC ELEMENTS