Susumu Oogi

Follow

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam drawing method and apparatus
- Patent number 8,188,449
- Issue date May 29, 2012
- Nuflare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam lithography apparatus and charged particle be...
- Patent number 7,750,324
- Issue date Jul 6, 2010
- Nuflare Technology, Inc.
- Susumu Oogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern writing method
- Patent number 6,346,354
- Issue date Feb 12, 2002
- Kabushiki Kaisha Toshiba
- Takayuki Abe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged beam lithography system
- Patent number 6,313,476
- Issue date Nov 6, 2001
- Kabushiki Kaisha Toshiba
- Mitsuko Shimizu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing method for determining optimal exposu...
- Patent number 5,863,682
- Issue date Jan 26, 1999
- Kabushiki Kaisha Toshiba
- Takayuki Abe
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS
- Publication number 20110012031
- Publication date Jan 20, 2011
- NuFlare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...
- Publication number 20090057575
- Publication date Mar 5, 2009
- NuFlare Technology, Inc.
- Susumu OOGI
- B82 - NANO-TECHNOLOGY