Susumu Ozasa

Person

Kashiwa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning electron microscope and image forming method therewith
- Patent number 5,523,567
- Issue date Jun 4, 1996
- Hitachi, Ltd.
- Shigeru Kawamata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing apparatus of electron microscope
- Patent number 4,933,553
- Issue date Jun 12, 1990
- Hitachi, Ltd.
- Junichiro Tomizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle accelerator using quadrupole electrodes
- Patent number 4,801,847
- Issue date Jan 31, 1989
- Hitachi, Ltd.
- Noriyuki Sakudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam lithography apparatus
- Patent number 4,692,579
- Issue date Sep 8, 1987
- Hitachi, Ltd.
- Norio Saitou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion source
- Patent number 4,658,143
- Issue date Apr 14, 1987
- Hitachi, Ltd.
- Katsumi Tokiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field emission type electron microscope using a multi-stage acceler...
- Patent number 4,642,461
- Issue date Feb 10, 1987
- Hitachi, Ltd.
- Junji Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ion source
- Patent number 4,629,930
- Issue date Dec 16, 1986
- Hitachi, Ltd.
- Noriyuki Sakudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position detecting system
- Patent number 4,589,773
- Issue date May 20, 1986
- Nippon Telegraph & Telephone Public Corporation
- Satoshi Ido
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for electron beam lithography
- Patent number 4,577,111
- Issue date Mar 18, 1986
- Hitachi, Ltd.
- Norio Saitou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure method with electron beam exposure apparatus
- Patent number 4,489,241
- Issue date Dec 18, 1984
- Hitachi, Ltd.
- Tadahito Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of deflection calibration for a charged partic...
- Patent number 4,443,703
- Issue date Apr 17, 1984
- Nippon Telegraph & Telephone Public Corporation
- Nobuo Shimazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam control system
- Patent number 4,437,008
- Issue date Mar 13, 1984
- Nippon Telegraph & Telephone Public Corporation
- Tadahito Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron lens equipment
- Patent number 4,400,622
- Issue date Aug 23, 1983
- Nippon Telegraph & Telephone Public Corporation
- Yoshinobu Takeuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for correcting deflection distortion in an apparatus for cha...
- Patent number 4,396,901
- Issue date Aug 2, 1983
- Hitachi, Ltd.
- Norio Saitou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for electron beam lithography
- Patent number 4,199,688
- Issue date Apr 22, 1980
- Hitachi, Ltd.
- Susumu Ozasa
- H01 - BASIC ELECTRIC ELEMENTS

Susumu Ozasa

Person

Patents Grantslast 30 patents

Scanning electron microscope and image forming method therewith

Focusing apparatus of electron microscope

Charged particle accelerator using quadrupole electrodes

Electron beam lithography apparatus

Ion source

Field emission type electron microscope using a multi-stage acceler...

Plasma ion source

Position detecting system

Apparatus for electron beam lithography

Exposure method with electron beam exposure apparatus

Method and apparatus of deflection calibration for a charged partic...

Electron beam control system

Electron lens equipment

Method for correcting deflection distortion in an apparatus for cha...

Apparatus for electron beam lithography