Suzanne Johanna Antonetta Geertruda Cosijns

Person

Casteren, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Cyclic error measurements and calibration procedures in interferome...
- Patent number 11,287,242
- Issue date Mar 29, 2022
- ASML Netherlands B.V.
- Maarten Jozef Jansen
- G01 - MEASURING TESTING
Information Patent Grant
Athermalization of an alignment system
- Patent number 10,866,531
- Issue date Dec 15, 2020
- ASML Netherlands B.V.
- Suzanne Johanna Antonetta Geertruda Cosijns
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Encoder, position measurement system and lithographic apparatus inv...
- Patent number 10,768,025
- Issue date Sep 8, 2020
- ASML Netherlands B.V.
- Wouter Onno Pril
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,345,717
- Issue date Jul 9, 2019
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,977,348
- Issue date May 22, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate positioning system, lithographic apparatus and device man...
- Patent number 9,470,988
- Issue date Oct 18, 2016
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Wavelength Tracking System, Method to Calibrate a Wavelength Tracki...
- Publication number 20230056872
- Publication date Feb 23, 2023
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus VAN DER PASCH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wavelength Tracking System, Method to Calibrate a Wavelength Tracki...
- Publication number 20210072088
- Publication date Mar 11, 2021
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus VAN DER PASCH
- G01 - MEASURING TESTING
Information Patent Application
CYCLIC ERROR MEASUREMENTS AND CALIBRATION PROCEDURES IN INTERFEROME...
- Publication number 20190265019
- Publication date Aug 29, 2019
- ASML NETHERLANDS B.V.
- Maarten Jozef JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Athermalization of an Alignment System
- Publication number 20190219927
- Publication date Jul 18, 2019
- ASML NETHERLANDS B.V.
- Suzanne Johanna Antonetta Geertruda COSIJNS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20180239258
- Publication date Aug 23, 2018
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENCODER, POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20170343390
- Publication date Nov 30, 2017
- ASML NETHERLANDS B.V.
- Wouter Onno PRIL
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MAN...
- Publication number 20150277242
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Suzanne Johanna Antonetta Geertruda Cosijns

Person

Patents Grantslast 30 patents

Cyclic error measurements and calibration procedures in interferome...

Athermalization of an alignment system

Encoder, position measurement system and lithographic apparatus inv...

Lithographic apparatus and method

Lithographic apparatus and method

Substrate positioning system, lithographic apparatus and device man...

Patents Applicationslast 30 patents

Wavelength Tracking System, Method to Calibrate a Wavelength Tracki...

Wavelength Tracking System, Method to Calibrate a Wavelength Tracki...

CYCLIC ERROR MEASUREMENTS AND CALIBRATION PROCEDURES IN INTERFEROME...

Athermalization of an Alignment System

LITHOGRAPHIC APPARATUS AND METHOD

ENCODER, POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS

SUBSTRATE POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MAN...