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Sven Eric Henrichs
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Hillsboro, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Consistent mask targeting through standardized drop-in-cells
Patent number
10,955,739
Issue date
Mar 23, 2021
Intel Coropration
Harsha Grunes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography mask having sub-resolution phased assist features
Patent number
9,046,761
Issue date
Jun 2, 2015
Intel Corporation
Shem O. Ogadhoh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High resolution phase shift mask
Patent number
8,399,158
Issue date
Mar 19, 2013
Intel Corporation
Chang Ju Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography masks for improved line-end patterning
Patent number
7,816,061
Issue date
Oct 19, 2010
Intel Corporation
Richard Schenker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Focus detection structure
Patent number
7,056,625
Issue date
Jun 6, 2006
Intel Corporation
Jose J. Garcia
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
CONSISTENT MASK TARGETING THROUGH STANDARDIZED DROP-IN-CELLS
Publication number
20200209734
Publication date
Jul 2, 2020
Intel Corporation
Harsha GRUNES
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY MASK HAVING SUB-RESOLUTION PHASED ASSIST FEATURES
Publication number
20130216941
Publication date
Aug 22, 2013
Shem O. Ogadhoh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH RESOLUTION PHASE SHIFT MASK
Publication number
20120164563
Publication date
Jun 28, 2012
Chang Ju Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process for fabrication of alternating phase shift masks
Publication number
20090098469
Publication date
Apr 16, 2009
Kishore K. Chakravorty
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography masks for improved line-end patterning
Publication number
20080318137
Publication date
Dec 25, 2008
Richard Schenker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Focus detection structure
Publication number
20040241558
Publication date
Dec 2, 2004
Intel Corporation
Jose J. Garcia
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY