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Goettingen, DE
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last 30 patents
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Patent Grant
Arrangement for the generation of short-wavelength radiation based...
Patent number
7,541,604
Issue date
Jun 2, 2009
XTREME techonolgies GmbH
Sven Goetze
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Radiation source with high average EUV radiation output
Patent number
6,815,900
Issue date
Nov 9, 2004
Xtreme technologies GbmH
Imtiaz Ahmad
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
ARRANGEMENT FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED...
Publication number
20070114946
Publication date
May 24, 2007
XTREME technologies GmbH;
SVEN GOETZE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation source with high average EUV radiation output
Publication number
20040145292
Publication date
Jul 29, 2004
XTREME technologies GmbH;
Imtiaz Ahmad
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR