Sven Gunnar Krister Magnusson

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Veldhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Method of measuring properties of dynamic positioning errors in a l...
- Patent number 8,554,510
- Issue date Oct 8, 2013
- ASML Netherlands B.V.
- Frank Staals
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring focus of a lithographic projection apparatus
- Patent number 8,436,998
- Issue date May 7, 2013
- ASML Netherlands B.V.
- Gerardus Carolus Johannus Hofmans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY