Sven HANSEN

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Garching, DE

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Patents Grantslast 30 patents

Information Patent Grant
Positioning device
- Patent number 11,075,102
- Issue date Jul 27, 2021
- Suss MicroTec Lithography GmbH
- Sven Hansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for treating a disc-shaped substrate and support adapter
- Patent number 10,101,672
- Issue date Oct 16, 2018
- Suss MicroTec Lithography GmbH
- Sven Hansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chuck, in particular for use in a mask aligner
- Patent number 9,824,909
- Issue date Nov 21, 2017
- SUSS MicroTec Lithography GmbH
- Sven Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for active wedge error compensation between two o...
- Patent number 9,329,473
- Issue date May 3, 2016
- Suss MicroTec Lithography GmbH
- Sven Hansen
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
WAFER SUPPORT SYSTEM, WAFER SUPPORT DEVICE, SYSTEM COMPRISING A WAF...
- Publication number 20190096733
- Publication date Mar 28, 2019
- SUSS MicroTec Lithography GmbH
- Yasuaki AMANO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
POSITIONING DEVICE
- Publication number 20180138070
- Publication date May 17, 2018
- SUSS MICROTEC LITHOGRAPHY GMBH
- Sven Hansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for Treating a Disc-Shaped Substrate and Support Adapter
- Publication number 20160370715
- Publication date Dec 22, 2016
- SUSS MICROTEC LITHOGRAPHY GMBH
- Sven Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Chuck for Suction and Holding a Wafer
- Publication number 20160240414
- Publication date Aug 18, 2016
- SUSS MICROTEC LITHOGRAPHY GMBH
- Matthias Conradi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCK, IN PARTICULAR FOR USE IN A MASK ALIGNER
- Publication number 20150294890
- Publication date Oct 15, 2015
- SUSS MICROTEC LITHOGRAPHY MGBH
- Sven HANSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR ACTIVE WEDGE ERROR COMPENSATION BETWEEN TWO O...
- Publication number 20120299208
- Publication date Nov 29, 2012
- Sven Hansen
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL