Sven Martin

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for measuring a substrate for semiconductor lithography
- Patent number 11,880,145
- Issue date Jan 23, 2024
- Carl Zeiss SMT GmbH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for characterizing a microlithographic mask
- Patent number 11,112,702
- Issue date Sep 7, 2021
- Carl Zeiss SMT GmbH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection device for detecting a structure on an area portion of a...
- Patent number 11,029,259
- Issue date Jun 8, 2021
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MEASURING A SUBSTRATE FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20230136478
- Publication date May 4, 2023
- Carl Zeiss SMT GMBH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20210063892
- Publication date Mar 4, 2021
- Carl Zeiss SMT GMBH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION DEVICE FOR DETECTING A STRUCTURE ON AN AREA PORTION OF A...
- Publication number 20200191728
- Publication date Jun 18, 2020
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING