Sven Ulmer

Follow

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for moving an optical element of a projection exposure appar...
- Patent number 8,879,046
- Issue date Nov 4, 2014
- Carl Zeiss SMT GmbH
- Karl-Eugen Aubele
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MOVING AN OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPAR...
- Publication number 20140078487
- Publication date Mar 20, 2014
- Karl-Eugen Aubele
- G02 - OPTICS