Sven Urban

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Neu-Ulm, DE

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Patents Applicationslast 30 patents

Information Patent Application
METHOD, OPTICAL SYSTEM, TEST DEVICE AND ARRANGEMENT
- Publication number 20240302453
- Publication date Sep 12, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20240288777
- Publication date Aug 29, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20240280916
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS