Sven Van Haver

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Nootdorp, NL

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Patents Grantslast 30 patents

Information Patent Grant
Methods and patterning devices for measuring phase aberration
- Patent number 9,201,311
- Issue date Dec 1, 2015
- ASML Netherlands B.V.
- Willem Marie Julia Marcel Coene
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Methods and Patterning Devices For Measuring Phase Aberration
- Publication number 20130010306
- Publication date Jan 10, 2013
- ASML NETHERLANDS B.V.
- Willem Marie Julia Marcel Coene
- G01 - MEASURING TESTING