Svetlana B. Radovanov

Person

Brookline, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ion source with single-slot tubular cathode
- Patent number 11,631,567
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with biased extraction plate
- Patent number 11,600,473
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with tubular cathode
- Patent number 11,424,097
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped electrode
- Patent number D956005
- Issue date Jun 28, 2022
- Applied Materials, Inc.
- Robert C. Lindberg
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Ion source with single-slot tubular cathode
- Patent number 11,127,557
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam quality control using a movable mass resolving device
- Patent number 11,049,691
- Issue date Jun 29, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with biased extraction plate
- Patent number 10,923,306
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with tubular cathode
- Patent number 10,748,738
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlling ion beam properties using ener...
- Patent number 10,468,224
- Issue date Nov 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High brightness ion beam extraction using bias electrodes and magne...
- Patent number 10,290,462
- Issue date May 14, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Boron implanting using a co-gas
- Patent number 10,290,466
- Issue date May 14, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Negative ribbon ion beams from pulsed plasmas
- Patent number 10,290,470
- Issue date May 14, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Daniel Distaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled RF plasma source with magnetic confinement and...
- Patent number 10,049,861
- Issue date Aug 14, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for multilayer deposition
- Patent number 9,988,711
- Issue date Jun 5, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High brightness ion beam extraction using bias electrodes and magne...
- Patent number 9,922,795
- Issue date Mar 20, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Boron implanting using a co-gas
- Patent number 9,865,430
- Issue date Jan 9, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving ion beam quality in a non-mass-analyzed ion imp...
- Patent number 9,840,772
- Issue date Dec 12, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Negative ribbon ion beams from pulsed plasmas
- Patent number 9,734,991
- Issue date Aug 15, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Daniel Distaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving ion beam quality in a non-mass-analyzed ion imp...
- Patent number 9,677,171
- Issue date Jun 13, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniformity control using adjustable internal antennas
- Patent number 9,613,777
- Issue date Apr 4, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for mass analyzed ion beam
- Patent number 9,536,712
- Issue date Jan 3, 2017
- Varian Semiconductor Equipment Associates, Inc.
- W. Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam uniformity control
- Patent number 9,520,259
- Issue date Dec 13, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of ion angular distribution of ion beams with hidden deflec...
- Patent number 9,514,912
- Issue date Dec 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-aperture extraction system for angled ion beam
- Patent number 9,478,399
- Issue date Oct 25, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma potential modulated ion implantation system
- Patent number 9,297,063
- Issue date Mar 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and techniques for energetic neutral beam processing
- Patent number 9,288,889
- Issue date Mar 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and system for plasma-assisted ion beam processing
- Patent number 9,232,628
- Issue date Jan 5, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam uniformity control
- Patent number 9,230,773
- Issue date Jan 5, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for processing a substrate
- Patent number 9,093,372
- Issue date Jul 28, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Technique for processing a substrate
- Patent number 9,064,795
- Issue date Jun 23, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE
- Publication number 20210383995
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE
- Publication number 20210287872
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source With Biased Extraction Plate
- Publication number 20210134569
- Publication date May 6, 2021
- Applied Materials, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC FILTER WITH SHAPED ELECTRODES
- Publication number 20210090845
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Robert C. Lindberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH TUBULAR CATHODE
- Publication number 20200343071
- Publication date Oct 29, 2020
- Applied Materials, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source With Biased Extraction Plate
- Publication number 20200294750
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING ION BEAM PROPERTIES USING ENER...
- Publication number 20190198283
- Publication date Jun 27, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Quality Control Using A Movable Mass Resolving Device
- Publication number 20190198292
- Publication date Jun 27, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Brightness Ion Beam Extraction
- Publication number 20180166250
- Publication date Jun 14, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Imp...
- Publication number 20180087148
- Publication date Mar 29, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Boron Implanting Using A Co-Gas
- Publication number 20180068830
- Publication date Mar 8, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Negative Ribbon Ion Beams from Pulsed Plasmas
- Publication number 20170309454
- Publication date Oct 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Daniel Distaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Imp...
- Publication number 20170247791
- Publication date Aug 31, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND TECHNIQUES FOR TIME MODULATED EXTRACTION OF AN ION BEAM
- Publication number 20170178866
- Publication date Jun 22, 2017
- Svetlana B. Radovanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Brightness Ion Beam Extraction
- Publication number 20170032927
- Publication date Feb 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Negative Ribbon Ion Beams from Pulsed Plasmas
- Publication number 20170032937
- Publication date Feb 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Daniel Distaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MULTILAYER DEPOSITION
- Publication number 20160333464
- Publication date Nov 17, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-APERTURE EXTRACTION SYSTEM FOR ANGLED ION BEAM
- Publication number 20160284520
- Publication date Sep 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Boron Implanting Using A Co-Gas
- Publication number 20160163510
- Publication date Jun 9, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Uniformity Control
- Publication number 20160111241
- Publication date Apr 21, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Uniformity Control using Adjustable Internal Antennas
- Publication number 20160079042
- Publication date Mar 17, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED RF PLASMA SOURCE WITH MAGNETIC CONFINEMENT AND...
- Publication number 20160071704
- Publication date Mar 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF ION ANGULAR DISTRIBUTION OF ION BEAMS WITH HIDDEN DEFLEC...
- Publication number 20160071693
- Publication date Mar 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Imp...
- Publication number 20150354056
- Publication date Dec 10, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MASS ANALYZED ION BEAM
- Publication number 20150357167
- Publication date Dec 10, 2015
- Varian Semiconductor Equipment Associates, Inc.
- W. Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRAZING ANGLE PLASMA PROCESSING FOR MODIFYING A SUBSTRATE SURFACE
- Publication number 20150255243
- Publication date Sep 10, 2015
- Applied Materials, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique For Processing A Substrate
- Publication number 20150179455
- Publication date Jun 25, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND TECHNIQUES FOR ENERGETIC NEUTRAL BEAM PROCESSING
- Publication number 20140272179
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PLASMA CONTROL USING BOUNDARY ELECTRODE
- Publication number 20140265853
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR HIGH RATE HYDROGEN IMPLANTATION AND CO...
- Publication number 20140256121
- Publication date Sep 11, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS

Svetlana B. Radovanov

Person

Patents Grantslast 30 patents

Ion source with single-slot tubular cathode

Ion source with biased extraction plate

Ion source with tubular cathode

Shaped electrode

Ion source with single-slot tubular cathode

Ion beam quality control using a movable mass resolving device

Ion source with biased extraction plate

Ion source with tubular cathode

Apparatus and method for controlling ion beam properties using ener...

High brightness ion beam extraction using bias electrodes and magne...

Boron implanting using a co-gas

Negative ribbon ion beams from pulsed plasmas

Inductively coupled RF plasma source with magnetic confinement and...

Apparatus and method for multilayer deposition

High brightness ion beam extraction using bias electrodes and magne...

Boron implanting using a co-gas

Method of improving ion beam quality in a non-mass-analyzed ion imp...

Negative ribbon ion beams from pulsed plasmas

Method of improving ion beam quality in a non-mass-analyzed ion imp...

Uniformity control using adjustable internal antennas

Apparatus and method for mass analyzed ion beam

Ion beam uniformity control

Control of ion angular distribution of ion beams with hidden deflec...

Multi-aperture extraction system for angled ion beam

Plasma potential modulated ion implantation system

Apparatus and techniques for energetic neutral beam processing

Method and system for plasma-assisted ion beam processing

Ion beam uniformity control

Technique for processing a substrate

Technique for processing a substrate

Patents Applicationslast 30 patents

ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE

ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE

Ion Source With Biased Extraction Plate

ELECTROSTATIC FILTER WITH SHAPED ELECTRODES

ION SOURCE WITH TUBULAR CATHODE

Ion Source With Biased Extraction Plate

APPARATUS AND METHOD FOR CONTROLLING ION BEAM PROPERTIES USING ENER...

Ion Beam Quality Control Using A Movable Mass Resolving Device

High Brightness Ion Beam Extraction

Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Imp...

Boron Implanting Using A Co-Gas

Negative Ribbon Ion Beams from Pulsed Plasmas

Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Imp...

APPARATUS AND TECHNIQUES FOR TIME MODULATED EXTRACTION OF AN ION BEAM

High Brightness Ion Beam Extraction

Negative Ribbon Ion Beams from Pulsed Plasmas

APPARATUS AND METHOD FOR MULTILAYER DEPOSITION

MULTI-APERTURE EXTRACTION SYSTEM FOR ANGLED ION BEAM

Boron Implanting Using A Co-Gas

Ion Beam Uniformity Control

Uniformity Control using Adjustable Internal Antennas

INDUCTIVELY COUPLED RF PLASMA SOURCE WITH MAGNETIC CONFINEMENT AND...

CONTROL OF ION ANGULAR DISTRIBUTION OF ION BEAMS WITH HIDDEN DEFLEC...

Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Imp...

APPARATUS AND METHOD FOR MASS ANALYZED ION BEAM

GRAZING ANGLE PLASMA PROCESSING FOR MODIFYING A SUBSTRATE SURFACE

Technique For Processing A Substrate

APPARATUS AND TECHNIQUES FOR ENERGETIC NEUTRAL BEAM PROCESSING

SYSTEM AND METHOD FOR PLASMA CONTROL USING BOUNDARY ELECTRODE

TECHNIQUES AND APPARATUS FOR HIGH RATE HYDROGEN IMPLANTATION AND CO...