Membership
Tour
Register
Log in
Swayambhu P. BEHERA
Follow
Person
Santa Clara, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Film thickness uniformity improvement using edge ring and bias elec...
Patent number
11,380,575
Issue date
Jul 5, 2022
Applied Materials, Inc.
Kin Pong Lo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus of processing wafers with compressive or tensi...
Patent number
10,403,535
Issue date
Sep 3, 2019
Applied Materials, Inc.
Zheng John Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High temperature electrostatic chucking with dielectric constant en...
Patent number
10,325,800
Issue date
Jun 18, 2019
Applied Materials, Inc.
Prashant Kulshreshtha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-conformal carbon film deposition
Patent number
10,074,534
Issue date
Sep 11, 2018
Applied Materials, Inc.
Swayambhu P. Behera
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultra-conformal carbon film deposition
Patent number
9,721,784
Issue date
Aug 1, 2017
Applied Materials, Inc.
Swayambhu P. Behera
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
FILM THICKNESS UNIFORMITY IMPROVEMENT USING EDGE RING AND BIAS ELEC...
Publication number
20220301920
Publication date
Sep 22, 2022
Applied Materials, Inc.
Kin Pong LO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM THICKNESS UNIFORMITY IMPROVEMENT USING EDGE RING AND BIAS ELEC...
Publication number
20220028656
Publication date
Jan 27, 2022
Applied Materials, Inc.
Kin Pong LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT EN...
Publication number
20190355609
Publication date
Nov 21, 2019
Applied Materials, Inc.
Prashant KULSHRESHTHA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRA-CONFORMAL CARBON FILM DEPOSITION
Publication number
20170301537
Publication date
Oct 19, 2017
Applied Materials, Inc.
Swayambhu P. BEHERA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT EN...
Publication number
20160064264
Publication date
Mar 3, 2016
Applied Materials, Inc.
Prashant KULSHRESHTHA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSI...
Publication number
20160049323
Publication date
Feb 18, 2016
Applied Materials, Inc.
Zheng John YE
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
ULTRA-CONFORMAL CARBON FILM DEPOSITION LAYER-BY-LAYER DEPOSITION OF...
Publication number
20160005596
Publication date
Jan 7, 2016
Applied Materials, Inc.
Swayambhu P. BEHERA
H01 - BASIC ELECTRIC ELEMENTS