Sy-Yuan Brian Shieh

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Removal of process residues on the backside of a substrate
- Patent number 8,083,963
- Issue date Dec 27, 2011
- Applied Materials, Inc.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
REMOVAL OF PROCESS RESIDUES ON THE BACKSIDE OF A SUBSTRATE
- Publication number 20080194111
- Publication date Aug 14, 2008
- APPLIED MATERIALS, INC.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS