Sylvain Dutartre

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Montigny Le Bretonneux, FR

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Patents Grantslast 30 patents

Information Patent Grant
Alignment of collector device in lithographic apparatus
- Patent number 8,704,199
- Issue date Apr 22, 2014
- ASML Netherlands B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Alignment of Collector Device in Lithographic Apparatus
- Publication number 20110188018
- Publication date Aug 4, 2011
- ASML NETHERLANDS B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY