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Sylvia Boehlmann
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Dresden, DE
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last 30 patents
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Patent Grant
Profile control on ring anode plating chambers for multi-step recipes
Patent number
8,147,670
Issue date
Apr 3, 2012
Advanced Micro Devices, Inc.
Sylvia Boehlmann
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
PROFILE CONTROL ON RING ANODE PLATING CHAMBERS FOR MULTI-STEP RECIPES
Publication number
20090057153
Publication date
Mar 5, 2009
Sylvia Boehlmann
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR