Sylvie Charpenay

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Vernon, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Thermal imaging for semiconductor process monitoring
- Patent number 7,155,363
- Issue date Dec 26, 2006
- MKS Instruments, Inc.
- Peter A. Rosenthal
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring the composition and other proper...
- Patent number 6,485,872
- Issue date Nov 26, 2002
- MKS Instruments, Inc.
- Peter A. Rosenthal
- G01 - MEASURING TESTING