Syo Fukata

Person

Yokkaichi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Three-dimensional memory device containing self-aligned bit line co...
- Patent number 11,935,784
- Issue date Mar 19, 2024
- SanDisk Technologies LLC
- Fumitaka Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition apparatus including an off-axis lift-and-rotation unit a...
- Patent number 11,598,005
- Issue date Mar 7, 2023
- SanDisk Technologies LLC
- Shoichi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone plasma-enhanced chemical vapor deposition apparatus and...
- Patent number 11,551,961
- Issue date Jan 10, 2023
- SanDisk Technologies LLC
- Shoichi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone plasma-enhanced chemical vapor deposition apparatus and...
- Patent number 11,538,708
- Issue date Dec 27, 2022
- SanDisk Technologies LLC
- Shoichi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ deposition and etch process and apparatus for precision pat...
- Patent number 10,847,376
- Issue date Nov 24, 2020
- SanDisk Technologies LLC
- Yusuke Osawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making three-dimensional semiconductor memory device havi...
- Patent number 9,978,768
- Issue date May 22, 2018
- SanDisk Technologies LLC
- Jiyin Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level contact to a 3D memory array and method of making
- Patent number 9,305,935
- Issue date Apr 5, 2016
- SanDisk Technologies Inc.
- Yao-Sheng Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level contact to a 3D memory array and method of making
- Patent number 8,994,099
- Issue date Mar 31, 2015
- SanDisk Technologies Inc.
- Yao-Sheng Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level contact to a 3D memory array and method of making
- Patent number 8,828,884
- Issue date Sep 9, 2014
- SanDisk Technologies Inc.
- Yao-Sheng Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THREE-DIMENSIONAL MEMORY DEVICE CONTAINING SELF-ALIGNED BIT LINE CO...
- Publication number 20220399232
- Publication date Dec 15, 2022
- SANDISK TECHNOLOGIES LLC
- Fumitaka AMANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANISOTROPIC ETCH APPARATUS WITH LOCAL ETCH DIRECTION ADJUSTMENT CAP...
- Publication number 20210391154
- Publication date Dec 16, 2021
- SANDISK TECHNOLOGIES LLC
- Syo FUKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS INCLUDING AN OFF-AXIS LIFT-AND-ROTATION UNIT A...
- Publication number 20210348272
- Publication date Nov 11, 2021
- SANDISK TECHNOLOGIES LLC
- Shoichi MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND...
- Publication number 20210351059
- Publication date Nov 11, 2021
- SANDISK TECHNOLOGIES LLC
- Shoichi MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND...
- Publication number 20210351058
- Publication date Nov 11, 2021
- SANDISK TECHNOLOGIES LLC
- Shoichi MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU DEPOSITION AND ETCH PROCESS AND APPARATUS FOR PRECISION PAT...
- Publication number 20200006080
- Publication date Jan 2, 2020
- SANDISK TECHNOLOGIES LLC
- Yusuke OSAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE HAVI...
- Publication number 20180006041
- Publication date Jan 4, 2018
- SanDisk Technologies LLC
- Jiyin XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LEVEL CONTACT TO A 3D MEMORY ARRAY AND METHOD OF MAKING
- Publication number 20150179663
- Publication date Jun 25, 2015
- SANDISK TECHNOLOGIES INC.
- Yao-Sheng Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LEVEL CONTACT TO A 3D MEMORY ARRAY AND METHOD OF MAKING
- Publication number 20140367759
- Publication date Dec 18, 2014
- Yao-Sheng Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Level Contact to a 3D Memory Array and Method of Making
- Publication number 20130313627
- Publication date Nov 28, 2013
- SanDisk Technologies, Inc.
- Yao-Sheng Lee
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Three-dimensional memory device containing self-aligned bit line co...

Deposition apparatus including an off-axis lift-and-rotation unit a...

Multi-zone plasma-enhanced chemical vapor deposition apparatus and...

Multi-zone plasma-enhanced chemical vapor deposition apparatus and...

In-situ deposition and etch process and apparatus for precision pat...

Method of making three-dimensional semiconductor memory device havi...

Multi-level contact to a 3D memory array and method of making

Multi-level contact to a 3D memory array and method of making

Multi-level contact to a 3D memory array and method of making

Patents Applicationslast 30 patents

THREE-DIMENSIONAL MEMORY DEVICE CONTAINING SELF-ALIGNED BIT LINE CO...

ANISOTROPIC ETCH APPARATUS WITH LOCAL ETCH DIRECTION ADJUSTMENT CAP...

DEPOSITION APPARATUS INCLUDING AN OFF-AXIS LIFT-AND-ROTATION UNIT A...

MULTI-ZONE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND...

MULTI-ZONE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND...

IN-SITU DEPOSITION AND ETCH PROCESS AND APPARATUS FOR PRECISION PAT...

METHOD OF MAKING THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE HAVI...

MULTI-LEVEL CONTACT TO A 3D MEMORY ARRAY AND METHOD OF MAKING

MULTI-LEVEL CONTACT TO A 3D MEMORY ARRAY AND METHOD OF MAKING

Multi-Level Contact to a 3D Memory Array and Method of Making