Syoichi Sato

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Machida-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for treating article to be treated
- Patent number 7,208,428
- Issue date Apr 24, 2007
- Tokyo Electron Limited
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for treating article to be treated
- Publication number 20040219793
- Publication date Nov 4, 2004
- Shingo Hishiya
- C30 - CRYSTAL GROWTH