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Syouichiro Himuro
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Fukuoka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck
Patent number
7,760,484
Issue date
Jul 20, 2010
Toto Ltd.
Ikuo Itakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck
Patent number
7,468,880
Issue date
Dec 23, 2008
Toto Ltd.
Ikuo Itakura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Electrostatic chuck
Publication number
20080273284
Publication date
Nov 6, 2008
TOTO LTD.
Ikuo Itakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic chuck
Publication number
20060268491
Publication date
Nov 30, 2006
TOTO LTD.
Ikuo Itakura
H01 - BASIC ELECTRIC ELEMENTS