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Syozo Takada
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Ibaraki, JP
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Patents Grants
last 30 patents
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Patent Grant
CMP polishing method, CMP polishing apparatus, and process for prod...
Patent number
8,241,426
Issue date
Aug 14, 2012
Nikon Corporation
Syozo Takada
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
Information
Patent Application
CMP Polishing Method, CMP Polishing Apparatus, and Process for Prod...
Publication number
20120315831
Publication date
Dec 13, 2012
Syozo Takada
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
CMP Polishing Method, CMP Polishing Apparatus, and Process for Prod...
Publication number
20090047785
Publication date
Feb 19, 2009
Syozo Takada
H01 - BASIC ELECTRIC ELEMENTS