Syuhei YONEZAWA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film forming method, boron film, and film forming apparatus
- Patent number 10,388,524
- Issue date Aug 20, 2019
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for substrate processing
- Patent number 10,381,233
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240222157
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Song yun Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220068642
- Publication date Mar 3, 2022
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210305066
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Song yun Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE PROCESSING
- Publication number 20180182638
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Forming Method, Boron Film, and Film Forming Apparatus
- Publication number 20180174838
- Publication date Jun 21, 2018
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...