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Syuichi Kobayashi
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Fukushima, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for double-side polishing wafer
Patent number
11,298,796
Issue date
Apr 12, 2022
Shin-Etsu Handotai Co., Ltd.
Yuki Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Method for evaluating polishing pad and method for polishing wafer
Patent number
10,118,272
Issue date
Nov 6, 2018
Shin-Etsu Handotai Co., Ltd.
Yuki Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Method of producing carrier for use in double-side polishing appara...
Patent number
9,764,443
Issue date
Sep 19, 2017
Shin-Etsu Handotai Co., Ltd.
Kazuya Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier for a double-side polishing apparatus, double-side polishin...
Patent number
9,327,382
Issue date
May 3, 2016
Shin-Etsu Handotai Co., Ltd.
Junichi Ueno
B24 - GRINDING POLISHING
Information
Patent Grant
Method of double-side polishing wafer
Patent number
9,266,215
Issue date
Feb 23, 2016
Shin-Etsu Handotai Co., Ltd.
Kazuya Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Double-side polishing apparatus
Patent number
8,834,234
Issue date
Sep 16, 2014
Shin-Etsu Handotai Co., Ltd.
Junichi Ueno
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad, manufacturing method thereof and polishing method
Patent number
8,545,291
Issue date
Oct 1, 2013
Fujibo Holdings Inc.
Kohki Itoyama
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
8,454,410
Issue date
Jun 4, 2013
Shin-Etsu Handotai Co., Ltd.
Koji Kitagawa
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier for double-side polishing apparatus, double-side polishing...
Patent number
8,118,646
Issue date
Feb 21, 2012
Shin-Etsu Handotai Co., Ltd.
Kazuya Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Double-side polishing method for wafer
Patent number
7,727,053
Issue date
Jun 1, 2010
Shin-Etsu Handotai Co., Ltd.
Junichi Ueno
B24 - GRINDING POLISHING
Information
Patent Grant
Method for evaluating wafer configuration, wafer, and wafer sorting...
Patent number
6,975,960
Issue date
Dec 13, 2005
Shin-Etsu Handotai Co., Ltd.
Makoto Kobayashi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR DOUBLE-SIDE POLISHING WAFER
Publication number
20180272497
Publication date
Sep 27, 2018
Shin-Etsu Handotai Co., Ltd.
Yuki TANAKA
B24 - GRINDING POLISHING
Information
Patent Application
MANUFACTURING METHOD OF CARRIER FOR DOUBLE-SIDE POLISHING APPARATUS...
Publication number
20170069502
Publication date
Mar 9, 2017
Shin-Etsu Handotai Co., Ltd.
Kazuya Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR EVALUATING POLISHING PAD AND METHOD FOR POLISHING WAFER
Publication number
20160193711
Publication date
Jul 7, 2016
Shin-Etsu Handotai Co., Ltd.
Yuki TANAKA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF PRODUCING CARRIER FOR USE IN DOUBLE-SIDE POLISHING APPARA...
Publication number
20150375363
Publication date
Dec 31, 2015
Shin-Etsu Handotai Co., Ltd.
Kazuya SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DOUBLE-SIDE POLISHING WAFER
Publication number
20150147942
Publication date
May 28, 2015
Shin-Etsu Handotai Co., Ltd.
Kazuya Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOUBLE-SIDE POLISHING APPARATUS
Publication number
20120329373
Publication date
Dec 27, 2012
Shin-Etsu Handotai Co., Ltd.
Junichi Ueno
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING PAD, MANUFACTURING METHOD THEREOF AND POLISHING METHOD
Publication number
20120100783
Publication date
Apr 26, 2012
Shin-Etsu Handotai Co., Ltd.
Kohki Itoyama
B24 - GRINDING POLISHING
Information
Patent Application
CARRIER FOR DOUBLE-SIDE POLISHING APPARATUS, DOUBLE-SIDE POLISHING...
Publication number
20110124271
Publication date
May 26, 2011
Shin-Etsu Handotai Co., Ltd.
Kazuya Sato
B24 - GRINDING POLISHING
Information
Patent Application
CARRIER FOR A DOUBLE-SIDE POLISHING APPARATUS, DOUBLE-SIDE POLISHIN...
Publication number
20110104995
Publication date
May 5, 2011
Shin-Etsu Handotai Co., Ltd.
Junichi Ueno
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS
Publication number
20100144249
Publication date
Jun 10, 2010
Shin-Etsu Handotai Co., Ltd.
Koji Kitagawa
B24 - GRINDING POLISHING
Information
Patent Application
Double-Side Polishing Method for Wafer
Publication number
20090124175
Publication date
May 14, 2009
Shin-Etsu Handotai Co., Ltd.
Junichi Ueno
B24 - GRINDING POLISHING
Information
Patent Application
Wafer shape evaluating method, wafer, and wafer selecting method
Publication number
20040215418
Publication date
Oct 28, 2004
Makoto Kobayashi
G01 - MEASURING TESTING