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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,923,242
Issue date
Mar 5, 2024
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,843,027
Issue date
Dec 12, 2023
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
11,694,891
Issue date
Jul 4, 2023
Tokyo Electron Limited
Syuji Nozawa
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,387,139
Issue date
Jul 12, 2022
Tokyo Electron Limited
Syuji Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method and substrate processing...
Patent number
11,342,223
Issue date
May 24, 2022
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,282,699
Issue date
Mar 22, 2022
Tokyo Electron Limited
Syuji Nozawa
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Resistive change elements using passivating interface gaps and meth...
Patent number
11,258,023
Issue date
Feb 22, 2022
Nantero, Inc.
Mark Ramsbey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor memory
Patent number
11,139,313
Issue date
Oct 5, 2021
Tokyo Electron Limited
Sunghil Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,081,321
Issue date
Aug 3, 2021
Tokyo Electron Limited
Syuji Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device manufacturing method
Patent number
11,069,536
Issue date
Jul 20, 2021
Tokyo Electron Limited
Sunghil Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus, film forming method, and storage medium
Patent number
10,960,435
Issue date
Mar 30, 2021
Tokyo Electron Limited
Makoto Fujikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
10,957,531
Issue date
Mar 23, 2021
Tokyo Electron Limited
Syuji Nozawa
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
10,790,135
Issue date
Sep 29, 2020
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
10,755,971
Issue date
Aug 25, 2020
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device and vacuum processing...
Patent number
10,629,448
Issue date
Apr 21, 2020
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method, substrate processing app...
Patent number
10,490,405
Issue date
Nov 26, 2019
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
10,446,438
Issue date
Oct 15, 2019
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, program, control apparatus, film formi...
Patent number
10,096,499
Issue date
Oct 9, 2018
Tokyo Electron Limited
Yuichi Takenaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus for performing accurate end point detec...
Patent number
8,580,077
Issue date
Nov 12, 2013
Tokyo Electron Limited
Kosuke Ogasawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus for perfor...
Patent number
7,662,646
Issue date
Feb 16, 2010
Tokyo Electron Limited
Kosuke Ogasawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch amount detection method, etching method, and etching system
Patent number
7,481,944
Issue date
Jan 27, 2009
Tokyo Electron Limited
Syuji Nozawa
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240150500
Publication date
May 9, 2024
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240021419
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230383407
Publication date
Nov 30, 2023
TOKYO ELECTRON LIMITED
Naoki UMEHARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING SYSTEM AND FILM FORMING METHOD
Publication number
20230070274
Publication date
Mar 9, 2023
TOKYO ELECTRON LIMITED
Syuji NOZAWA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230067094
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20220139682
Publication date
May 5, 2022
TOKYO ELECTRON LIMITED
Kazuya ICHIKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESISTIVE CHANGE ELEMENTS USING PASSIVATING INTERFACE GAPS AND METH...
Publication number
20220045290
Publication date
Feb 10, 2022
Nantero, Inc.
Mark RAMSBEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20210336000
Publication date
Oct 28, 2021
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20210320033
Publication date
Oct 14, 2021
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20210272840
Publication date
Sep 2, 2021
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
Publication number
20210202298
Publication date
Jul 1, 2021
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20210047724
Publication date
Feb 18, 2021
TOKYO ELECTRON LIMITED
Syuji NOZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20210043447
Publication date
Feb 11, 2021
TOKYO ELECTRON LIMITED
Syuji NOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Method and Substrate Processing Apparatus
Publication number
20200299840
Publication date
Sep 24, 2020
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20200294797
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Syuji NOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Manufacturing Semiconductor Device
Publication number
20200294844
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Syuji NOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR MEMORY
Publication number
20200152656
Publication date
May 14, 2020
TOKYO ELECTRON LIMITED
Sunghil LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE MANUFACTURING METHOD
Publication number
20200152478
Publication date
May 14, 2020
TOKYO ELECTRON LIMITED
Sunghil LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS AND TEMPERATURE CONTROL METHOD
Publication number
20200101490
Publication date
Apr 2, 2020
TOKYO ELECTRON LIMITED
Syuji NOZAWA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20200098561
Publication date
Mar 26, 2020
TOKYO ELECTRON LIMITED
Syuji NOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus
Publication number
20200083029
Publication date
Mar 12, 2020
TOKYO ELECTRON LIMITED
Syuji NOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Manufacturing Semiconductor Device
Publication number
20190393083
Publication date
Dec 26, 2019
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL DEVICE, FILM FORMING APPARATUS, CONTROL METHOD, FILM FORMIN...
Publication number
20190390347
Publication date
Dec 26, 2019
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
Publication number
20190363011
Publication date
Nov 28, 2019
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20190122883
Publication date
Apr 25, 2019
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Manufacturing Semiconductor Device
Publication number
20180286744
Publication date
Oct 4, 2018
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, AND STORAGE MEDIUM
Publication number
20180264516
Publication date
Sep 20, 2018
TOKYO ELECTRON LIMITED
Makoto FUJIKAWA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Method of Manufacturing Semiconductor Device and Vacuum Processing...
Publication number
20180269069
Publication date
Sep 20, 2018
Tatsuya YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APP...
Publication number
20180261458
Publication date
Sep 13, 2018
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, CONTROL APPARATUS, FILM FORMI...
Publication number
20140335693
Publication date
Nov 13, 2014
TOKYO ELECTRON LIMITED
Yuichi Takenaga
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...