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DC Bias in Plasma Process
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Publication number 20240071722
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Publication date Feb 29, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Sheng-Liang Pan
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H01 - BASIC ELECTRIC ELEMENTS
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POLISHING METROLOGY
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Publication number 20230381911
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chih Hung CHEN
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H01 - BASIC ELECTRIC ELEMENTS
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DC Bias in Plasma Process
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Publication number 20220359158
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Publication date Nov 10, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Sheng-Liang Pan
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H01 - BASIC ELECTRIC ELEMENTS
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FINFET DEVICE AND METHOD
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Publication number 20210066500
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Publication date Mar 4, 2021
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Su-Hao Liu
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20210057580
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Publication date Feb 25, 2021
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chi On Chui
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H01 - BASIC ELECTRIC ELEMENTS
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Dry Ashing by Secondary Excitation
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Publication number 20200098588
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Publication date Mar 26, 2020
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Jack Kuo-Ping Kuo
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H01 - BASIC ELECTRIC ELEMENTS
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