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Sze-An Wu
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Hsin-Chu, TW
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last 30 patents
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Patent Grant
Bypass gas feed system and method to improve reactant gas flow and...
Patent number
7,296,532
Issue date
Nov 20, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Lung Cheng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming in-situ SRO HDP-CVD barrier film
Patent number
6,759,347
Issue date
Jul 6, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Lung Cheng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to neutralize charge imbalance following a wafer cleaning pr...
Patent number
6,703,317
Issue date
Mar 9, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Lung Cheng
H01 - BASIC ELECTRIC ELEMENTS