Szu-Che Tsai

Follow

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Inductively-coupled high density plasma producing apparatus and pla...
- Patent number 6,150,763
- Issue date Nov 21, 2000
- Tsai; Chuen-Horng
- Keh-Chyang Leou
- H01 - BASIC ELECTRIC ELEMENTS