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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
EUV photo masks and manufacturing method thereof
Patent number
12,044,959
Issue date
Jul 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Yi Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV photo masks and manufacturing method thereof
Patent number
11,592,737
Issue date
Feb 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Yi Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF
Publication number
20240337918
Publication date
Oct 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Yi TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF
Publication number
20230205072
Publication date
Jun 29, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Yi TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF
Publication number
20210373430
Publication date
Dec 2, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Yi TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY