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Szu-Tsun Ma
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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
Method of boosting wafer cleaning efficiency and increasing process...
Patent number
6,773,933
Issue date
Aug 10, 2004
Macronix International Co., Ltd.
Szu-Tsun Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication method for shallow trench isolation
Patent number
6,706,612
Issue date
Mar 16, 2004
Macronix International Co., Ltd.
Szu-Tsun Ma
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR PREVENTING CORROSION OF TUNGSTEN PLUG
Publication number
20040152305
Publication date
Aug 5, 2004
CHUNG-LUNG YIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
[METHOD OF FABRICATING SHALLOW TRENCH ISOLATION]
Publication number
20040126962
Publication date
Jul 1, 2004
Szu-Tsun Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fabrication method for shallow trench isolation
Publication number
20040005765
Publication date
Jan 8, 2004
Szu-Tsun Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of boosting wafer cleaning efficiency and increasing process...
Publication number
20040005780
Publication date
Jan 8, 2004
Szu-Tsun Ma
H01 - BASIC ELECTRIC ELEMENTS