TREA

Ta-Cheng Lien

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  • Hsinchu County, TW
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    RETICLE CARRIER AND METHOD FOR MANUFACTURING AUXILIARY STRUCTURE IN...
    • Publication number 20250201610
    • Publication date Jun 19, 2025
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Lu-Chih LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CLEANING METHOD FOR PHOTO MASKS AND APPARATUS THEREFOR
    • Publication number 20250180983
    • Publication date Jun 5, 2025
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hsin-Chang LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF FABRICATING AND SERVICING A PHOTOMASK
    • Publication number 20250068060
    • Publication date Feb 27, 2025
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chun-Fu YANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHODS AND SYSTEMS FOR IMPROVING PLASMA IGNITION STABILITY
    • Publication number 20240404834
    • Publication date Dec 5, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ping-Hsun Lin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ENHANCING LITHOGRAPHY OPERATION FOR MANUFACTURING SEMICONDUCTOR DEV...
    • Publication number 20240393701
    • Publication date Nov 28, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yi-Chen SU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHODS FOR FORMING EXTREME ULTRAVIOLET MASK COMPRISING MAGNETIC MA...
    • Publication number 20240393674
    • Publication date Nov 28, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Kevin TANADY
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MASK CHARACTERIZATION METHODS AND APPARATUSES
    • Publication number 20240385111
    • Publication date Nov 21, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chien-Cheng Chen
    • G01 - MEASURING TESTING
  • Information Patent Application

    EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF
    • Publication number 20240385506
    • Publication date Nov 21, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hsin-Chang LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF MANUFACTURING EUV PHOTO MASKS
    • Publication number 20240369918
    • Publication date Nov 7, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hsin-Chang LEE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
    • Publication number 20240369921
    • Publication date Nov 7, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Pei-Cheng HSU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE ASSEMBLY AND METHOD OF MAKING SAME
    • Publication number 20240345472
    • Publication date Oct 17, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hsin-Chang Lee
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS OF MAKING A SEMICONDUCTOR DEVICE
    • Publication number 20240337917
    • Publication date Oct 10, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Pei-Cheng HSU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF
    • Publication number 20240337918
    • Publication date Oct 10, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hung-Yi TSAI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    REFLECTIVE MASK
    • Publication number 20240302731
    • Publication date Sep 12, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Pei-Cheng HSU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method Of Critical Dimension Control By Oxygen And Nitrogen Plasma...
    • Publication number 20240264520
    • Publication date Aug 8, 2024
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Pei-Cheng HSU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EXTREME ULTRAVIOLET MASK WITH TANTALUM BASE ALLOY ABSORBER
    • Publication number 20240192581
    • Publication date Jun 13, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Pei-Cheng HSU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    LITHOGRAPHY MASK
    • Publication number 20240134268
    • Publication date Apr 25, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chien-Cheng Chen
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    CLEANING METHOD FOR PHOTO MASKS AND APPARATUS THEREFOR
    • Publication number 20240085781
    • Publication date Mar 14, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hsin-Chang LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PHOTOMASK AND METHODS FOR MEASURING AND MANUFACTURING THE PHOTOMASK
    • Publication number 20240077804
    • Publication date Mar 7, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ping-Hsun LIN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF MANUFACTURING PHOTO MASKS
    • Publication number 20240069431
    • Publication date Feb 29, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Che HSIEH
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF
    • Publication number 20240053669
    • Publication date Feb 15, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wen-Chang HSUEH
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EXTREME ULTRAVIOLET MASK WITH DIFFUSION BARRIER LAYER
    • Publication number 20240045318
    • Publication date Feb 8, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hsin-Chang LEE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MASK AND METHOD FOR FORMING THE SAME
    • Publication number 20240045317
    • Publication date Feb 8, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hsin-Chang LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    OPTICAL ASSEMBLY WITH COATING AND METHODS OF USE
    • Publication number 20230408906
    • Publication date Dec 21, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Pei-Cheng Hsu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FABRICATING MASK
    • Publication number 20230402283
    • Publication date Dec 14, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ping-Hsun LIN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ENHANCING LITHOGRAPHY OPERATION FOR MANUFACTURING SEMICONDUCTOR DEV...
    • Publication number 20230384693
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yih-Chen SU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK
    • Publication number 20230375911
    • Publication date Nov 23, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Ping-Hsun LIN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF
    • Publication number 20230375910
    • Publication date Nov 23, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Pei-Cheng Hsu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EXTREME ULTRAVIOLET MASK WITH ALLOY BASED ABSORBERS
    • Publication number 20230375921
    • Publication date Nov 23, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Pei-Cheng HSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF MANUFACTURING EUV PHOTO MASKS
    • Publication number 20230367193
    • Publication date Nov 16, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hsin-Chang LEE
    • H01 - BASIC ELECTRIC ELEMENTS