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Taichung City, TW
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last 30 patents
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Patent Grant
Dummy insertion for improving throughput of electron beam lithography
Patent number
11,899,367
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Ming Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dummy insertion for improving throughput of electron beam lithography
Patent number
11,526,081
Issue date
Dec 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Ming Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dummy insertion for improving throughput of electron beam lithography
Patent number
11,054,748
Issue date
Jul 6, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Ming Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Dummy Insertion for Improving Throughput of Electron Beam Lithography
Publication number
20230273524
Publication date
Aug 31, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Shih-Ming Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Dummy Insertion for Improving Throughput of Electron Beam Lithography
Publication number
20210405534
Publication date
Dec 30, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Shih-Ming Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Dummy Insertion for Improving Throughput of Electron Beam Lithography
Publication number
20200098545
Publication date
Mar 26, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Shih-Ming Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY